Calculation of ion energy distributions from radio frequency plasmas using a simplified kinetic approach

Journal of Applied Physics

Volumn 87, Issue 8, 2000, Pages 3646-3653

  Misakian, Martin ^a   Wang, Yicheng ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000796281     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.372394     Document Type: Article

References (24)

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14. 8
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16. s indicates the sheath width and d is related to the electric field associated with the presheath. Approximately the same interpretation can be given here if we think of the presheath region as extending far into the body of the plasma and that d does not completely characterize the presheath region.
17. Because the plasma and the corresponding impedance continually changes during the pulsed excitation of the plasma, it is not possible for the matching network coupling the rf energy to the coil to be continually optimized. For the IED measurements reported in this article, the matching network was optimized for continuous excitation and the rf power value indicated is for the net power to the matching network driving the coil under continuous excitation.
18. E. Benck, determined from measurement of optical emissions from argon plasma at 2.66 Pa (private communication).
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