Impact of low carbon concentrations on the electrical properties of highly boron doped SiGe layers

Applied Physics Letters

Volumn 71, Issue 11, 1997, Pages 1522-1524

  Osten, H J ^a   Lippert, G ^a   Gaworzewski, P ^a   Sorge, R ^a  

^a IHP   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000782235     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.119955     Document Type: Article

References (19)

1. S. C. Jain, Germanium-Silicon Strained Layers and Heterostructures (Academic, Boston, 1994).
2. H. J. Osten, in Proceedings of the 1966 IEEE Semiconducting and SemiInsulating Materials Conference, edited by C. Fontaine, Toulouse 1996 (unpublished), p. 195.
3. H. J. Osten, D. Endisch, E. Bugiel, B. Dietrich, G. G. Fischer, M. Kim, D. Krüger, and P. Zaumseil, Semicond. Sci. Technol. 11, 1678 (1996).
4. P. A. Stolk, H.-J. Gossmann, D. J. Eaglesham, and J. M. Poate, Mater. Sci. Eng. B 36, 275 (1996).
5. G. Davies and R. C. Newman, Carbon in Monocrystalline Silicon, in Handbook of Semiconductors, Vol. 3, edited by T. S. Moss (Elsevier Science, New York, 1994).
6. H. J. Osten, M. Kim, K. Pressel, and P. Zaumseil, J. Appl. Phys. 80, 6711 (1996).
7. G. G. Fischer, P. Zaumseil, E. Bugiel, and H. J. Osten, J. Appl. Phys. 77, 1934 (1995).
8. W. J. Taylor, T. Y. Tan, and U. Goesele, Appl. Phys. Lett. 62, 3336 (1993).
9. J. Tersoff, Phys. Rev. Lett. 64, 1757 (1990).
10. G. D. Watkins, in Radiation Effects in Semiconductors, edited by M. Hulin (Dunod, Paris, 1965), p. 97.
11. P. M. Fahey, P. B. Griffin, and J. D. Plummer, Rev. Mod. Phys. 61, 289 (1989).
12. P. J. Drevinsky, C. E. Caefer, S. P. Tobin, J. C. Mikkelsen, and L. C. Kimerling, Mater. Res. Soc. Symp. Proc. 104, 167 (1988).
13. T. T. Fang, W. T. C. Fang, P. B. Griffin, and J. D. Plummer, Appl. Phys. Lett. 68, 791 (1996).
14. L. C. Kimerling, M. T. Asam, J. L. Benton, P. J. Drevinsky, and C. E. Caefer, Mater. Sci. Forum 38-41, 141 (1989).
15. L. D. Lanzarotti, J. C. Sturm, E. Stach, R. Hull, T. Buyuklimanli, and C. Magee, Tech. Dig. Int. Electron Devices Meet. 249 (1996).
16. P. Gaworzewski and K. Tittelbach-Helmrich (unpublished).
17. H. J. Osten and P. Gaworzewski (unpublished).
18. R. People, IEEE J. Quantum Electron. QE-22, 1696 (1986).
19. R. Sorge, Solid-State Electron. 37, 217 (1994).