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Volumn 63, Issue 12, 2001, Pages
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Dissociative adsorption of PH3 on the Si(001) surface
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Author keywords
[No Author keywords available]
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Indexed keywords
DIMER;
HYDROGEN;
PHOSPHINE;
PHOSPHORUS;
SILICON;
ADSORPTION;
ARTICLE;
CALCULATION;
CHEMICAL BOND;
DECOMPOSITION;
DISSOCIATION;
SCANNING TUNNELING MICROSCOPY;
SURFACE PROPERTY;
TEMPERATURE;
VIBRATION;
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EID: 0000596564
PISSN: 10980121
EISSN: 1550235X
Source Type: Journal
DOI: 10.1103/PhysRevB.63.125321 Document Type: Article |
Times cited : (41)
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References (29)
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