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Volumn 454, Issue 1, 2000, Pages 152-156
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Dissociative adsorption of NF3 on Si(001)-(2×1)
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Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL BONDS;
CHEMISORPTION;
DIMERS;
DISSOCIATION;
ELECTRIC POTENTIAL;
ELECTRONIC STRUCTURE;
GAS ADSORPTION;
NITROGEN COMPOUNDS;
PASSIVATION;
RELAXATION PROCESSES;
SURFACE PHENOMENA;
DENSITY FUNCTIONAL THEORY;
FIRST PRINCIPLES PSEUDOPOTENTIAL GENERALIZED GRADIENT APPROXIMATION;
NITROGEN FLUORIDE;
WORK FUNCTION;
SEMICONDUCTING SILICON;
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EID: 0033717924
PISSN: 00396028
EISSN: None
Source Type: Journal
DOI: 10.1016/S0039-6028(00)00163-1 Document Type: Article |
Times cited : (12)
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References (13)
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