Silicon nitride islands as oxidation masks for the formation of silicon nanopillars

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 4, 1999, Pages 1294-1299

  Ha, Jeong Sook ^a,b   Park, Kang Ho ^a   Yun, Wan Soo ^a   Lee, El Hang ^a  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

^b Inha University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000513702     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.582100     Document Type: Article

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