Initial stages of nitridation of Si(111) surfaces: X-ray photoelectron spectroscopy and scanning tunneling microscopy studies

Surface Science

Volumn 376, Issue 1-3, 1997, Pages 99-112

  Tabe, Michiharu ^a   Yamamoto, Takeshi ^a  

^a SHIZUOKA UNIVERSITY   (Japan)

Author keywords

Growth; Nucleation; Scanning tunneling microscopy; Silicon; Silicon nitride; X ray photoelectron spectroscopy

Indexed keywords

ANNEALING; BINDING ENERGY; CONDENSATION; NITRIDING; NUCLEATION; SCANNING TUNNELING MICROSCOPY; SILICON NITRIDE; THERMAL EFFECTS; X RAY PHOTOELECTRON SPECTROSCOPY;

CHEMICAL SHIFTS;

SILICON;

EID: 0031120392     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(96)01314-3     Document Type: Article

References (37)

1. J.W. Evans and S.K. Chatterji, J. Phys. Chem. 62 (1958) 1064.
2. W. Kaiser and C.D. Thurmond, J. Appl. Phys. 30 (1959) 427.
3. T. Ito, S. Hijiya, T. Nozaki, H. Arakawa, M. Shinoda and Y. Fukukawa, J. Electrochem. Soc. 125 (1978) 449.
4. T. Ito, T. Nozaki, H. Arakawa and M. Shinoda, Appl. Phys. Lett. 32 (1978) 330.
5. S.P. Mrarka, C.C. Chang and A.C. Adams, J. Electrochem. Soc. 126 (1979) 996.
6. T. Ito, I. Kato, T. Nozaki, T. Nakamura and H. Ishikawa, Appl. Phys. Lett. 38 (1981) 370.
7. U.R. Baumvol, F.C. Stedile, J.-J. Ganem, S. Rigo and I. Trimaille, J. Electrochem. Soc. 142 (1995) 1205.
8. A.G. Schrott and S.C. Fain Jr., Surf. Sci. 111 (1981) 39.
9. A.G. Schrott and S.C. Fain Jr., Surf. Sci. 123 (1982) 204.
10. A.G. Schrott, Q.X. Su and S.C. Fain Jr., Surf. Sci. 123 (1982) 223.
11. K. Edamoto, S. Tanaka, M. Onchi and M. Nishijima, Surf. Sci. 167 (1986) 285.
12. H.-C. Wang, R.-F. Lin and X. Wang, Surf. Sci. 188 (1987) 199.
13. R. Heckingbottom and P.R. Wood, Surf. Sci. 36 (1973) 594.
14. L. Kubler, E.K. Hill, D. Bolmont and J.C. Peruchetti, Thin Solid Films 149 (1987) 385.
15. L. Kubler, J.L. Bischoff and D. Bolmont, Phys. Rev. B 38 (1988) 13 113.
16. J.L. Bischoff, L. Kubler and D. Bolmont, Surf. Sci. 209 (1989) 115.
17. E.G. Koehler, P.A. Coon and S.M. George, J. Vac. Sci. Technol. B 7 (1989) 1303.
18. Ph. Avouris and R. Wolkow, Phys. Rev. B 39 (1989) 5091.
19. J.L. Bischoff, F. Lutz, L. Kubler and D. Bolmont, Thin Solid Films 187 (1990) 101.
20. E.A. Khramtsova, A.A. Saranin and V.G. Lifshits, Surf. Sci. 280 (1993) L259.
21. J. Stober, B. Eisenhut, G. Rangelov and Th. Fauster, Surf. Sci. 321 (1994) 111.
22. E. Bauer, Y. Wei, T. Müller, A. Pavlovska and I.S.T. Tsong, Phys. Rev. B 51 (1995) 17 891.
23. M.D. Wiggins, R.J. Baird and P. Wynblatt, J. Vac. Sci. Technol. 18 (1981) 965.
24. M. Tabe, Jpn. J. Appl. Phys. 34 (1995) L1375.
25. Y. Ono, M. Tabe and H. Kageshima, Phys. Rev. B 48 (1993) 14 291.
26. H. Kageshima, Y. Ono, M. Tabe and T. Ohno, Jpn. J. Appl. Phys. 33 (1994) 4070.
27. F.G. Allen, J. Appl. Phys. 28 (1957) 1510.
28. B. Lewis and D.S. Campbell, J. Vac. Sci. Technol. 4 (1967) 209.
29. J.J. Lander, Surf. Sci. 1 (1964) 125.
30. J.V. Florio and W.D. Robertson, Surf. Sci. 22 (1970) 459.
31. S. Ino, Jpn. J. Appl. Phys. 16 (1977) 891.
32. P.A. Bennett and M.W. Webb, Surf. Sci. 104 (1981) 74.
33. W. Telieps and E. Bauer, Surf. Sci. 162 (1985) 163.
34. S. Kitamura, T. Sato and M. Iwatsuki, Nature 351 (1991) 215.
35. J. Chevrier, L.T. Vinh and A. Cruz, Surf. Sci. 268 (1992) L261.
36. M. Tabe, T.T. Chiang, I. Lindau and W.E. Spicer, Phys. Rev. B 34 (1986) 2706.
37. H. Kageshima and M. Tabe, Surf. Sci. 351 (1996) 53.