Modeling optical breakdown in dielectrics during ultrafast laser processing

Applied Optics

Volumn 40, Issue 18, 2001, Pages 3124-3131

  Fan, Ching Hua ^a   Longtin, Jon P ^a  

^a Stony Brook University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LASER ABLATION; LASER APPLICATIONS; MATHEMATICAL MODELS; THIN FILMS; ULTRASHORT PULSES;

OPTICAL BREAKDOWN;

DIELECTRIC MATERIALS;

EID: 0000450213     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.40.003124     Document Type: Article

References (41)

1. B. C. Stuart, M. D. Perry, M. D. Feit, L. B. Da Silva, A. M. Nev Rubenchik, S. Herman, H. Nguyen, and P. Armstrong, “Femtosecond laser processing,” in Conference on Laser and ElectroOptics, Vol. 11 of 1997 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1997), pp. 159-160.
2. T. R. Hsu, MEMS: Design, Manufacture and Processing (McGraw-Hill, New York, 2001), Chap. 4.
3. J. Ihlemann, A. Scholl, H. Schmidt, and B. Wolff-Rottke, “Nanosecond and femtosecond excimer-laser ablation of oxide ceramics,” Appl. Phys. A 60, 411-417 (1995).
4. B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, and M. D. Perry, “Optical ablation by high-power short-pulse lasers,” J. Opt. Soc. Am. B 13, 459-468 (1996).
5. B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, and M. D. Perry, “Nanosecond-to-femtosecond laser-induced breakdown in dielectrics,” Phys. Rev. B 53, 1749-1761 (1996).
6. J. Ihlemann, B. Wolff, and P. Simon, “Nanosecond and femtosecond excimer laser ablation of fused silica,” Appl. Phys. A 54, 363-368 (1992).
7. S. Kuper and M. Stuke, “Ablation of polytetrafluoroethylene (Teflon) with femtosecond UV excimer laser pulses,” Appl. Phys. Lett. 54, 4-6 (1989).
8. J. Sun, J. P. Longtin, and P. M. Norris, “Ultrafast laser micromachining of silica aerogels,” J. Non-Cryst. Solids 281, 39-47 (2001).
9. J. P. Longtin and C. L. Tien, “Efficient laser heating of transparent liquids using multiphoton absorption,” Int. J. Heat Mass Transfer 40, 951-959 (1997).
10. J. P. Longtin, “Using multiphoton absorption with high-intensity lasers to heat transparent liquids,” Chem. Eng. Tech-nol. 22, 77-80 (1999).
11. S. Preuss, A. Demchuk, and M. Stuke, “Sub-picosecond UV laser ablation of metals,” Appl. Phys. A 61, 33-37 (1995).
12. B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tunnermann, “Femtosecond, picosecond and nanosecond laser ablation of solids,” Appl. Phys. A 63, 109-115 (1996).
13. J. Jandeleit, G. Urbasch, H. D. Hoffmann, H. G. Treusch, and E. W. Kreutz, “Picosecond laser ablation of thin copper films,” Appl. Phys. A 63, 117-121 (1996).
14. G. Herbst, M. Steiner, G. Marowsky, and E. Matthias, “Ablation of Si and Ge using UV photoablation,” in Advanced Laser Processing of Materials-Fundamentals and Applications, Mater. Res. Soc. Symp. Proc. 397, 69-74 (1996).
15. I. Zergioti and M. Stuke, “Short pulse UV laser ablation of solid and liquid gallium,” Appl. Phys. A 67, 391-395 (1998).
16. A. A. Oraevsky, L. B. Da Silva, A. M. Rubenchik, M. D. Feit, M. E. Glinsky, M. D. Perry, B. M. Mammini, W. Small, and B. C. Stuart, “Plasma mediated ablation of biological tissues with nanosecond-to-femtosecond laser pulses: relative role of linear and nonlinear absorption,” IEEE J. Sel. Top. Quantum Electron. 2, 801-809 (1996).
17. R. Esenaliev, A. Oraevsky, S. Rastegar, C. Frederickson, and M. Motamedi, “Mechanism of dye-enhanced pulsed laser ablation of hard tissues: implications for dentistry,” IEEE J. Sel. Top. Quantum Electron. 2, 836-846 (1996).
18. D. X. Hammer, G. D. Noojin, R. J. Thomas, C. E. Clary, B. A. Rockwell, C. A. Toth, and W. P. Roach, “Intraocular laser surgical probe for membrane disruption by laser-induced breakdown,” Appl. Opt. 36, 1684-1693 (1997).
19. P. K. Kennedy, D. X. Hammer, and B. A. Rockwell, “Laser-induced breakdown in aqueous media,” Prog. Quantum. Electron. 21, 155-248 (1997).
20. X. Liu, D. Du, and G. Mourou, “Laser ablation and micromachining with ultrashort laser pulses,” IEEE J. Quantum Electron. 33, 1706-1716 (1997).
21. M. Sparks, D. L. Mills, R. Warren, T. Holstein, A. A. Maradu-din, L. J. Sham, E. Loh, Jr., and D. F. King, “Theory of electron-avalanche breakdown in solids,” Phys. Rev. B 24, 3519-3536 (1981).
22. Y. R. Shen, The Principles of Nonlinear Optics (Wiley, New York, 1984), Chap. 27.
23. S. C. Jones, P. Braunlich, R. T. Casper, X. A. Shen, and P. Kelly, “Recent progress on laser-induced modifications and intrinsic bulk damage of wide-gap optical materials,” Opt. Eng. 28, 1039-1068 (1989).
24. M. D. Perry, B. C. Stuart, P. S. Banks, M. D. Feit, V. Yanovsky, and A. M. Rubenchik, “Ultrashort-pulsed laser micromachining of dielectric materials,” J. Appl. Phys. 85, 6803-6810 (1999).
25. P. K. Kennedy, “A first-order model for computation of laser-induced breakdown thresholds in ocular and aqueous media. I. Theory,” IEEE J Quantum Electron. 31, 2241-2249 (1995).
26. D. X. Hammer, R. J. Thomas, G. D. Noojin, B. A. Rockwell, P. K. Kennedy, and W. P. Roach, “Experimental investigation of ultrashort pulse laser-induced breakdown thresholds in aqueous media,” IEEE J Quantum Electron. 32, 670-677 (1996).
27. A. Vogel, K. Nahen, D. Theisen, and J. Noack, “Plasma formation in water by picosecond and nanosecond Nd:YAG laser pulses. I. Optical breakdown at threshold and superthreshold irradiance,” IEEE J. Sel. Top. Quantum Electron. 2, 847-859 (1996).
28. J. Noack and A. Vogel, “Laser-induced plasma formation in water at nanosecond to femtosecond time scales: calculation of thresholds, absorption coefficients, and energy density,” IEEE J. Quantum Electron. 35, 1156-1167 (1999).
29. J. R. Bettis, “Correlation among the laser-induced breakdown thresholds in solids, liquids, and gases,” Appl. Opt. 31, 3448-3452 (1992).
30. F. Docchio, P. Regondi, M. R. C. Capon, and J. Mellerio, “Study of the temporal and spatial dynamics of plasmas induced in liquids by nanosecond Nd:YAG laser pulses. 1. Analysis of the plasma starting times,” Appl. Opt. 27, 3661-3668 (1988).
31. D. X. Hammer, E. D. Jansen, M. Frenz, G. D. Noojin, R. J. Thomas, J. Noack, A. Vogel, B. A. Rockwell, and A. J. Welch, “Shielding properties of laser-induced breakdown in water for pulse durations from 5 ns to 125 fs,” Appl. Opt. 36, 5630-5640 (1997).
32. Y. P. Raizer, “Breakdown and heating of gases under the influence of a laser beam,” Sov. Phys. Usp. 8, 650-673 (1966).
33. A. E. Siegman, Lasers (University Science, Mill Valley, Calif., 1986), Chap. 17.
34. 2O and NaCl,” Opt. Commun. 11, 265-269 (1974).
35. F. Docchio, P. Regondi, M. R. C. Capon, and J. Mellerio, “Study of the temporal and spatial dynamics of plasmas induced in liquids by nanosecond Nd:YAG laser pulses. 2. Plasma luminescence and shielding,” Appl. Opt. 27, 3669-3674 (1988).
36. B. C. Stuart, M. D. Feit, A. M. Rubenchik, B. W. Shore, and M. D. Perry, “Laser-induced damage in dielectrics with nanosecond to subpicosecond pulses,” Phys. Rev. Lett. 74, 2248-2251 (1995).
37. Q. Feng, J. V. Moloney, A. C. Newell, E. M. Wright, K. Cook, P. K. Kennedy, D. X. Hammer, B. A. Rockwell, and C. R. Thompson, “Theory and simulation on the threshold of water breakdown induced by focused ultrashort laser pulses,” IEEE J Quantum Electron. 33, 127-137 (1997).
38. 2 with pulse widths from 7 ns to 150 fs,” Appl. Phys. Lett. 64, 3071-3073 (1994).
39. D. J. Stolarski, J. Hardman, C. M. Bramlette, G. D. Noojin, R. J. Thomas, B. A. Rockwell, and W. P. Roach, “Integrated light spectroscopy of laser induced breakdown in aqueous media,” in Laser-Tissue Interaction VI, S. L. Jacques, ed., Proc. SPIE 2391, 100-109 (1995).
40. R. J. Thomas, D. X. Hammer, G. D. Noojin, D. J. Stolarski, B. A. Rockwell, and W. P. Roach, “Time-resolved spectroscopy of laser induced breakdown in water,” Laser-Tissue Interaction VII, S. L. Jacques, ed., Proc. SPIE 2681, 402-410 (1996)
41. M. Shirk and P. A. Molian, “A review of ultrashort pulsed laser ablation of materials,” J. Laser Appl. 10, 18-28 (1998).