Oxidation of Si1-yCy(0≤y≤0.02) strained layers grown on Si(001)

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 3, 1998, Pages 1757-1761

  Pressel, K ^a   Franz, M ^a   Kruger D ^a   Osten, H J ^a   Garrido, B ^b   Morante, J R ^b  

^a IHP   (Germany)

^b UNIVERSITY OF BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000436138     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (10)

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