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Applied Physics Letters

Volumn 70, Issue 7, 1997, Pages 874-876

Cu enhanced oxidation of SiGe and SiGeC

(3) Jaquez, E J a Bair, A E a Alford, T L a

a NONE

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001570525 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.118302 Document Type: Article

Times cited : (15)

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