Infrared spectroscopy of strained Si1-yCy alloys (0≤y≤0.015) grown on silicon

Thin Solid Films

Volumn 294, Issue 1-2, 1997, Pages 133-136

  Pressel, K ^a   Fischer, G G ^a   Zaumseil, P ^a   Kim, Myeongcheol ^a   Osten, H J ^a  

^a IHP   (Germany)

Author keywords

Alloys; Carbon; Infrared spectroscopy; Silicon

Indexed keywords

ANNEALING; INFRARED SPECTROSCOPY; MOLECULAR BEAM EPITAXY; SEMICONDUCTING FILMS; SEMICONDUCTOR GROWTH; X RAY DIFFRACTION ANALYSIS;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 0031074333     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)09267-X     Document Type: Article

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