Stresses, deformation, and void nucleation in locally debonded metal interconnects

Journal of Applied Physics

Volumn 84, Issue 10, 1998, Pages 5525-5530

  Shen, Y L ^a  

^a University of New Mexico   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000413294     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.368597     Document Type: Article

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