Thermal stresses in multilevel interconnections: Aluminum lines at different levels

Journal of Materials Research

Volumn 12, Issue 9, 1997, Pages 2219-2222

  Shen, Y L ^a  

^a University of New Mexico   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ASPECT RATIO; FINITE ELEMENT METHOD; THERMAL STRESS;

ALUMINUM LINES;

INTERCONNECTION NETWORKS;

EID: 0031235007     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1997.0296     Document Type: Article

References (12)

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