Applications and theory of the solid immersion lens

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3609, Issue , 1999, Pages 56-66

  Kino, G S ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMAGNETIC WAVE DIFFRACTION; FITS AND TOLERANCES; FOCUSING; LITHOGRAPHY; MICROMACHINING; MICROSCOPIC EXAMINATION; OPTICAL DATA STORAGE; REFRACTIVE INDEX;

SOLID IMMERSION LENSES (SIL);

OPTICAL INSTRUMENT LENSES;

EID: 0032650276     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (13)