Approach to enhance deuterium incorporation for improved hot carrier reliability in metal-oxide-semiconductor devices

Applied Physics Letters

Volumn 77, Issue 15, 2000, Pages 2358-2360

  Cheng, Kangguo ^a   Lee, Jinju ^a   Lyding, Joseph W ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000204127     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1317546     Document Type: Article

References (11)

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