Independent parallel scanning force microscopy using Pb(Zr,Ti)O3 microcantilever array

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1997, Pages 78-83

  Itoh, T ^a   Lee, C ^a   Chu, J ^a   Suga, T ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC EXCITATION; NATURAL FREQUENCIES; PIEZOELECTRIC DEVICES; SCANNING; SOL-GELS; THIN FILMS; VIBRATIONS (MECHANICAL);

LEAD ZIRCONATE TITANATE (PZT) MICROCANTILEVERS; SCANNING FORCE MICROSCOPE (SFM);

MICROSCOPIC EXAMINATION;

EID: 0030674258     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (19)