Effect of injection of Si self-interstitials on Sb diffusion in heterostructures

Physical Review B - Condensed Matter and Materials Physics

Volumn 58, Issue 20, 1998, Pages R13355-R13358

  Kuznetsov, A Yu ^a   Grahn, J ^b   Cardenas, J ^b   Svensson, B ^b  

^a INSTITUTE OF MICROELECTRONICS TECHNOLOGY AND HIGH PURITY MATERIALS   (Russian Federation)

^b ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000070811     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.58.R13355     Document Type: Article

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