Thermal nitridation enhanced diffusion of Sb and Si(100) doping superlattices

Applied Physics Letters

Volumn 69, Issue 9, 1996, Pages 1273-1275

  Mogi, T K ^a   Thompson, Michael O ^a   Gossmann, H J ^b   Poate, J M ^b   Luftman, H S ^b  

^a School of Operations Research and Industrial Engineering   (United States)

^b LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0041782286     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.117389     Document Type: Article

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