Thermodynamic analysis of InN and InxGa1-xN MOVPE using various nitrogen sources

Journal of Crystal Growth

Volumn 272, Issue 1-4 SPEC. ISS., 2004, Pages 341-347

  Kumagai, Yoshinao ^a   Kikuchi, Jun ^a   Matsuo, Yuriko ^a   Kangawa, Yoshihiro ^a   Tanaka, Ken ^a   Koukitu, Akinori ^a  

^a TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY   (Japan)

Author keywords

A1. Thermodynamic analysis; A3. Metalorganic vapor phase epitaxy; B1. Nitrides

Indexed keywords

AMMONIA; DATA ACQUISITION; GIBBS FREE ENERGY; METALLORGANIC VAPOR PHASE EPITAXY; NITRIDES; NITROGEN; STATISTICAL MECHANICS; THERMODYNAMICS;

CARRIER GAS MIXTURE; THERMOCHEMICAL DATA; THERMODYNAMIC ANALYSIS;

SEMICONDUCTING INDIUM COMPOUNDS;

EID: 9944265662     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2004.08.090     Document Type: Conference Paper

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