Experimental electron energy distribution functions in argon, nitrogen and oxygen high-density and low-pressure reflex and microwave plasma sources

Plasma Sources Science and Technology

Volumn 13, Issue 4, 2004, Pages 646-653

  Toader, Emil I ^a  

^a UNIVERSITY OF BUCHAREST   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ELECTRON CYCLOTRON RESONANCE; LANGMUIR BLODGETT FILMS; MAXWELL EQUATIONS; MICROWAVES; NITROGEN; OXYGEN; PLASMA SOURCES; SPECTROSCOPIC ANALYSIS;

ELECTRON ENERGY DISTRIBUTION (EED); PLASMA POTENTIAL; PLASMA PROCESSING; SUPER-ELASTIC COLLISIONS;

ELECTRON ENERGY LEVELS;

EID: 9944262474     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/13/4/013     Document Type: Article

References (39)

1. Lieberman M A and Lichtenberg A J 1994 Principles of Plasma Discharges and Materials Processing (New York: Wiley) pp 191-217
2. Grill A 1994 Cold Plasma in Materials Fabrication. From Fundamental to Applications (New York: IEEE) pp 86-112
3. Popov O (ed) 1995 High Density Plasma Sources (Park Ridge, NJ: Noyes)
4. Conrads H and Schmidt M 2000 Plasma Sources Sci. Technol. 9 441
5. Toader E I, Graham W G, Mahony C M O and Steen P G 2002 Rev. Sci. Instrum. 73 2974
6. Toader E I and Graham W G 2000 Plasma Sources Sci. Technol. 9 288
7. Toader E I, Fredriksen A and Aanesland A 2003 Rev. Sci. Instrum. 74 387
8. Druyvesteyn M J 1930 Z. Phys. 64 781
9. Passoth E, Kudrna P, Csambal C, Behnke J F, Tichy M and Helbig V 1997 J. Phys. D: Appl. Phys. 30 1763
10. Godyak V A, Piejak R B and Alexandrovich B M 1992 Plasma Sources Sci. Technol. 1 36
11. Swift J D and Schwar M J R 1986 Rev. Sci. Instrum. 57 2210 Swift J D and Schwar M J R 1969 Electrical Probes for Plasma Diagnostics (New York: Elsevier)
12. Swift J D and Schwar M J R 1986 Rev. Sci. Instrum. 57 2210 Swift J D and Schwar M J R 1969 Electrical Probes for Plasma Diagnostics (New York: Elsevier)
13. Bibinov N K, Kokh D B, Kolokolov N B, Kostenko V A, Meyer D, Vinogradov I P and Wiesemann K 1998 Plasma Sources Sci. Technol. 7 298
14. Godyak V A, Piejak R B and Alexandrovich B M 1995 Plasma Sources Sci. Technol. 4 332
15. Singh H and Graves D B 2000 J. Appl. Phys. 87 4098 Singh H and Graves D B 2000 J. Appl. Phys. 88 3889
16. Singh H and Graves D B 2000 J. Appl. Phys. 87 4098 Singh H and Graves D B 2000 J. Appl. Phys. 88 3889
17. Sang-Hun Seo, Jung-Hwan In and Hong-Young Chang 2004 Plasma Sources Sci. Technol. 13 409
18. Kortshagen U, Pukropski I and Zethoff M 1994 J. Appl. Phys. 76 2048
19. Sudit I D and Woods R C 1993 Rev. Sci. Instrum. 64 2440
20. Hopkins M B and Graham W G 1986 Rev. Sci. Instrum. 57 2210 Hopkins M B and Graham W G 1987 J. Phys. D: Appl. Phys. 20 838 Hopkins M B and Graham W G 1991 J. Appl. Phys. 69 3461
21. Hopkins M B and Graham W G 1986 Rev. Sci. Instrum. 57 2210 Hopkins M B and Graham W G 1987 J. Phys. D: Appl. Phys. 20 838 Hopkins M B and Graham W G 1991 J. Appl. Phys. 69 3461
22. Hopkins M B and Graham W G 1986 Rev. Sci. Instrum. 57 2210 Hopkins M B and Graham W G 1987 J. Phys. D: Appl. Phys. 20 838 Hopkins M B and Graham W G 1991 J. Appl. Phys. 69 3461
23. Gagne R R J and Cantin A 1972 J. Appl. Phys. 43 2639
24. Grosse S, Schluter H and Tatarova E 1994 Plasma Sources Sci. Technol. 3 545
25. Godyak V A 1990 Plasma-Surface Interactions and Processing of Materials ed O Auciello et al (Dordrecht: Kluwer) pp 95-134
26. Arslanbekov R R, Khromov N A and Kudryavtsev A A 1994 Plasma Sources Sci. Technol. 3 528
27. Chen F F 1997 Plasma Phys. Control. Fusion 39 1533
28. Koo B W, Hershkowitz N and Sarfaty M J 1999 J. Appl. Phys. 86 1213
29. Anderson C A, Hopkins M B and Graham W G 1990 Rev. Sci. Instrum. 61 448
30. Hopkins M B, Anderson C A and Graham W G 1989 Europhys. Lett. 8 141
31. Loureiro J and Ferreira C M 1986 J. Phys. D: Appl. Phys. 19 17
32. Guerra V and Loureiro L 1997 Plasma Sources Sci. Technol. 6 361
33. Anemia H, Ono S and Teii S 1987 J. Phys. Soc. Japan 56 4312
34. Bibinov N K, Kolokov D B, Kostenko V A, Meyer D, Vinogradov I P and Wiesemann K 1998 Plasma Sources Sci. Technol. 7 298
35. Vinogradov I P 1999 Plasma Sources Sci. Technol. 8 299
36. Fuller N C M, Malyshev M V, Donnelly V M and Irving P H 2000 Plasma Sources Sci. Technol. 9 116
37. Noble C J and Burke P G 1992 Phys. Rev. Lett. 68 2011
38. Higgins K, Noble C J and Burke P G 1994 J. Phys. B: At. Mol. Opt. Phys. 27 3203
39. Campbell L, Green M A, Brunger M J, Teubner P J O and Cartwright D C 2000 Phys. Rev. A 61 022706