Plasma parameter characterization of a reflex plasma source operating in oxygen

Plasma Sources Science and Technology

Volumn 9, Issue 3, 2000, Pages 288-294

  Toader, E I ^a   Graham, W G ^b  

^a UNIVERSITY OF BUCHAREST   (Romania)

^b QUEEN'S UNIVERSITY BELFAST   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODES; DIFFUSION; ELECTRIC CURRENTS; ELECTRIC DISCHARGES; ELECTRON EMISSION; ION BOMBARDMENT; MAGNETIC FIELD EFFECTS; OXYGEN; PLASMA DENSITY; PRESSURE EFFECTS;

HOLLOW-CATHODE DISCHARGE (HCD) PLASMAS; HOLLOW-CATHODE EFFECTS (HCE); PENNING DISCHARGE PLASMAS (PDP); REFLEX DISCHARGE PLASMAS;

PLASMA SOURCES;

EID: 0034251431     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/9/3/306     Document Type: Article

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