Optical investigations of the micro structure of hydrogenated amorphous carbon films

Journal of Non-Crystalline Solids

Volumn 227-230, Issue PART 1, 1998, Pages 583-587

  Paret, V ^a   Sadki, A ^a   Bounouh, Y ^a   Alameh, R ^a   Naud, C ^a   Zarrabian, M ^b   Seignac, A ^c   Turban, G ^b   Theye M L ^a  

^a CNRS   (France)

^b INSTITUT DES MATÉRIAUX JEAN ROUXEL   (France)

^c UNIVERSITÉ DE RENNES 1   (France)

Author keywords

Amorphous carbon; Bonding configurations; Optical properties

Indexed keywords

AMORPHOUS FILMS; CHEMICAL BONDS; ELECTRONIC PROPERTIES; MICROSTRUCTURE; OPTICAL PROPERTIES; PLASMA APPLICATIONS;

DUAL ELECTRON CYCLOTRON RESONANCE RADIO FREQUENCY PLASMA TECHNIQUE; HYDROGENATED AMORPHOUS CARBON FILMS;

CARBON;

EID: 0032065060     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(98)00146-X     Document Type: Article

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