Structural and chemical characterization of functional SiO xCy:H coatings for polymeric lenses

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 5, 2004, Pages 2402-2408

  Fernandez Hidalgo P ^a   Martin Palma R J ^b   Conde, A ^c   Gago, R ^d   Simancas, J ^c   Garcia Diego I ^c   Egio, A ^a   Martinez Duart J M ^b  

^a 08902 l'Hospitalet de Llobregat ^*  (Spain)

^b UNIVERSIDAD AUTÓNOMA DE MADRID   (Spain)

^c DEPARTMENT OF PHYSICAL METALLURGY   (Spain)

^d INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ANTIREFLECTION COATINGS; CARBON; CARRIER CONCENTRATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HARDNESS; HYDROGEN; MIXTURES; MULTILAYERS; ORGANIC POLYMERS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASTIC LENSES; REFRACTIVE INDEX; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON COMPOUNDS; X RAY PHOTOELECTRON SPECTROSCOPY;

ATMOSPHERIC LACQUERING; CONFORMAL DEPOSITION; HEXAMETHYLDISILOXANE (HMDSO); MULTILAYER FUNCTIONAL STRUCTURES;

PROTECTIVE COATINGS;

EID: 9744246807     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1795834     Document Type: Article

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