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Volumn 25, Issue 2-3 SPEC.ISS., 2004, Pages 319-325
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Erasable electrostatic lithography for quantum components
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Author keywords
Erasable electrostatic lithography; GaAs; Scanning probe; Surface
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
CHARACTERIZATION;
ELECTROSTATICS;
IMAGE ANALYSIS;
LIGHT EMITTING DIODES;
OPTIMIZATION;
PROBES;
QUANTUM THEORY;
SCANNING;
SEMICONDUCTING GALLIUM ARSENIDE;
CHARGE DENSITY;
ERASABLE ELECTROSTATIC LITHOGRAPHY;
QUANTUM COMPONENTS;
SCANNING PROBES;
LITHOGRAPHY;
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EID: 9744235240
PISSN: 13869477
EISSN: None
Source Type: Journal
DOI: 10.1016/j.physe.2004.06.031 Document Type: Conference Paper |
Times cited : (1)
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References (26)
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