Yield strengths and stress induced crackles in copper films: Effects of substrate and passivated layer

Chinese Physics

Volumn 13, Issue 2, 2004, Pages 0205-0211

  Zhang, Jian Min ^a   Xu, Ke Wei ^b  

^a SHAANXI NORMAL UNIVERSITY   (China)

^b XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

Copper film; Crackles; Microstructure; Yield strength

Indexed keywords

BENDING (DEFORMATION); CRACKS; DEPOSITION; GRAIN SIZE AND SHAPE; MICROSTRUCTURE; NICKEL; PASSIVATION; STEEL; STRESS ANALYSIS; SUBSTRATES; THIN FILMS; TITANIUM COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS; YIELD STRESS;

COPPER FILMS; CRACKLES; HIGH-SPEED STEEL; TI SUBSTRATES;

COPPER;

EID: 9644257646     PISSN: 10091963     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (22)

1. Murarka S P 1997 Mater. Sci. Eng. R 19 87
2. Børgesen P, Lee J K, Gleixner R and Li C Y 1992 Appl. Phys. Lett. 60 1076
3. Chaudhari P 1974 J. Appl. Phys. 45 4339
4. Gerth D, Katzer D and Schwarzer R 1992 Mater. Sci. Forum 94-96 557
5. Flinn P A 1991 J. Mater. Res. 6 1498
6. Vinci R P, Marieb T N and Bravman J C 1993 Mater. Res. Soc. Symp. Proc. 308 297
7. Rickerby D S, Bellamy B A and Jones A M 1987 Surf. Eng. 3 138
8. Li Z H, Wu G Y, Gu Y, Chen W R and Wang Y Y 1996 J. Vac. Sci. Technol. A 14 2693
9. Doerner M F, Gardner D S and Nix W D 1986 J. Mater. Res. 1 845
10. Griffin A J, Brotzen F R and Dunn C F 1987 Thin Solid Films 150 237
11. Zhang J M, Xu K W and Zhang M R 2003 Acta Phys. Sin. 52 1234 (in Chinese)
12. Zhang J M, Xu K W and Ma F 2003 Acta Phys. Sin. 52 1993 (in Chinese)
13. Noyan C and Sheikh G 1993 Mater. Res. Soc. Symp. Proc. 308 3
14. Zhang J M, Xu K W and He J W 1999 J. Mater. Sci. Lett. 18 471
15. Zhang J M and Xu K W 1999 J. Mater. Sci. Lett. 18 939
16. Zhang J M and Xu K W 2000 Progr. Cryst. Growth Charact. Mater. 40 315
17. Zhang J M, Xu K W and Ji V 2001 J. Cryst. Growth 226 168
18. Zhang J M, Xu K W and Ji V 2001 Appl. Surf. Sci. 180 1
19. Zhang J M, Xu K W 2002 Acta Phys. Sin. 51 2562 (in Chinese)
20. Zhang J M, Xu K W 2003 Acta Phys. Sin. 52 145 (in Chinese)
21. Zhang J M, Xu K W and Zhang M R 2003 Acta Phys. Sin. 52 1207 (in Chinese)
22. Hirth J P and Lothe J 1982 Theory of Dislocation (New York: Wiley) p761