Measuring and modeling stresses in Al metallization

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 5, 1996, Pages 2693-2695

  Li, Z H ^a   Wu, G Y ^a   Gu, Y ^a   Chen, W R ^a   Wang, Y Y ^a  

^a PEKING UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0030508349     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580189     Document Type: Article

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