Sol-gel MgO thin films for insulation on SiC

Materials Science in Semiconductor Processing

Volumn 7, Issue 4-6 SPEC. ISS., 2004, Pages 249-252

  Bondoux, Céline ^a   Prené, Philippe ^a   Belleville, Philippe ^a   Guillet, François ^a   Lambert, Sébastien ^a   Minot, Benoît ^a   Jérisian, Robert ^b  

^a CEA LE RIPAULT   (France)

^b STMICROELECTRONICS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLIZATION; DIELECTRIC MATERIALS; ELECTRIC FIELD EFFECTS; LEAKAGE CURRENTS; MAGNESIA; MICROSTRUCTURE; MICROWAVES; PERMITTIVITY; SOL-GELS; THERMAL CONDUCTIVITY; THIN FILMS;

BANDGAPS; HIGH-TEMPERATURE DEVICES; MICROWAVE FREQUENCIES;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 9544244797     PISSN: 13698001     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mssp.2004.09.017     Document Type: Conference Paper

References (12)

1. Casady JB, Johnson RW. Solid-State Electron 1996;39:1409-22.
2. Park YS. Semiconductor and semimetals. Academic press, vol. 52, 1998.
3. Raynaud C. J Non-Cryst Solids 2001;280:1-31.
4. Zetterling C- M, Östling M, Wongchotigol K, Spencer MG, Tang X, Harris CI, Nordell N, Wong SS. J Appl Phys 1997;82:2990-5.
5. Lipkin LA, Palmour JW. IEEE Trans Electron Dev 1999;46:546-8.
6. Yoon J- G, Kim K. Appl Phys Lett 1995;66:2661-3.
7. Fu X, Song Z, Wu G, Huang J, Duo X, Lin C. J Sol-gel Sci and Techn 1999;16:277-81.
8. Vuoristo P, Wahlroos J, Mäntylä T, Kettunen P. Thin Solid Films 1988;166:255-62.
9. Singh A, Pratap R. Thin Solid Films 1982;87:147-50.
10. Soukup RJ, Spelioti DE. J Appl Phys 1970;41:3229-36.
11. Sing J. Semiconductor devices. an introduction. New York: McGraw-Hill; 1994.
12. Stevenson JR, Hensley EB. J Appl Phys 1961;32:166-9.