The design and synthesis of heterometallic alkoxide-amides and their application in the MOCVD of zirconium-tin-titanate (ZTT)

Journal of Materials Chemistry

Volumn 14, Issue 21, 2004, Pages 3139-3143

  Eichler, Jack F ^a   Just, Oliver ^a   Rees Jr , William S ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

METALLORGANIC CHEMICAL VAPOR DEPOSITION; NITROGEN COMPOUNDS; SUBSTRATES; SYNTHESIS (CHEMICAL); THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY; ZIRCONIUM COMPOUNDS;

AMIDES; ZIRCONIUM TIN TITANATE (ZTT) FILMS;

ORGANOMETALLICS;

OXYGEN; SILICON; TETRAKIS(TERT BUTOXIDE)ZIRCONIUM; TIN; TITANIUM DERIVATIVE; UNCLASSIFIED DRUG; ZIRCONIUM; ZIRCONIUM DERIVATIVE;

CHEMICAL COMPOSITION; CHEMICAL PROCEDURES; CONFERENCE PAPER; FILM; HYPOBARISM; METAL ORGANIC CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; SURFACE PROPERTY; SYNTHESIS; TEMPERATURE DEPENDENCE; THICKNESS; VAPORIZATION;

EID: 9144262607     PISSN: 09599428     EISSN: None     Source Type: Journal    
DOI: 10.1039/b406777k     Document Type: Conference Paper

References (7)

1. D. A. Buchanan, IBM J. Res. Dev., 1999, 43, 245.
2. G. Wilk, R. Wallace and J. Anthony, J. Appl. Phys., 2001, 89, 5243.
3. R. van Dover, L. Schneemeyer and M. Fleming, Nature, 1998, 392, 162.
4. E. Mays, D. W. Hess and W. S. Rees, Jr., J. Crystal Growth, 2004, 261, 309.
5. P. Reiss and D. Fenske, Z. Anorg. Allg. Chem., 2000, 626, 1317.
6. J. Eichler, O. Just and W. S. Rees, Jr., Sulfur Silicon Phosphorus Relat. Elem., 2004, 179, 715-726.
7. D. Selent, J. Pickardt and P. Claus, J. Organomet. Chem., 1994, 468, 131.