Surface topography by wavelength scanning interferometry

Optical Engineering

Volumn 39, Issue 1, 2000, Pages 40-46

  Yamaguchi, Ichirou ^a   Yamamoto, Akihiro ^a   Yano, Masaru ^b  

^a INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

^b SAITAMA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

IMAGE PROCESSING; LASER TUNING; LIGHT INTERFERENCE; LIGHT SCATTERING; MIRRORS; SPECKLE;

SURFACE TOPOGRAPHY; WAVELENGTH SCANNING INTERFEROMETRY;

INTERFEROMETRY;

EID: 0033906917     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.602333     Document Type: Article

References (6)

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3. T. H. Barnes, T. Eiju, and K. Matsuda, "Rough surface profile measurement using speckle optical frequency domain reflectometry with an external cavity tunable diode laser," Optik (Stuttgart) 103, 93-100 (1996).
4. S. Kuwamura, and I. Yamaguchi, "Wavelength scanning profilometry for real-time surface shape measurement," Appl. Opt. 37, 4473-4482 (1997).
5. I. Yamaguchi, A. Yamamoto, and S. Kuwamurar, "Speckle decorrelation in surface profilometry by wavelength scanning interferometry," Appl. Opt. 37, 6721-6728 (1998).
6. S. Wada, K. Akagawa, and H. Tashiro, "Electronically tuned Ti:sapphire laser," Opt. Lett. 21, 731-733 (1996).