Control systems analysis of a multiscale simulation code for copper electrodeposition

Proceedings of the American Control Conference

Volumn 5, Issue , 2004, Pages 4243-4248

  Rusli, Effendi ^a   Drews, Timothy O ^a   Braatz, Richard D ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; COMPUTER SIMULATION; COPPER; ELECTRODEPOSITION; ELECTRODES; MONTE CARLO METHODS;

COPPER ELECTRODEPOSITION; PROTEIN MICROAARAYS; SUB-MICRON TRENCHES;

CONTROL SYSTEMS;

EID: 8744264883     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.23919/acc.2004.1383974     Document Type: Conference Paper

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