Accuracy of the non-destructive surface nanostructure quantification technique based on analysis of the XPS or AES peak shape

Surface and Interface Analysis

Volumn 26, Issue 4, 1998, Pages 249-269

  Tougaard, S ^a  

^a UNIVERSITY OF SOUTHERN DENMARK   (Denmark)

Author keywords

AES; Nano structures; Peak shape analysis; Quantitative surface analysis; XPS

Indexed keywords

EID: 85087243440     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/(sici)1096-9918(199804)26:4<249::aid-sia368>3.3.co;2-1     Document Type: Article

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