Low specific contact resistance to 3C-SiC grown on (100) Si substrates

Materials Science Forum

Volumn 556-557, Issue , 2007, Pages 721-724

  Bazin, A E ^a,b   Chassagne, T ^c,d   Michaud, J F ^a   Leycuras, A ^c   Portail, M ^c   Zielinski, M ^c   Collard, E ^b   Alquier, D ^a  

^a UNIVERSITÉ DE TOURS   (France)

^b STMICROELECTRONICS   (France)

^c CNRS   (France)

^d SAVOIE TECHNOLAC   (France)

Author keywords

3C SiC; Nickel; Ohmic contacts; Specific contact resistance

Indexed keywords

EID: 85086681064     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/0-87849-442-1.721     Document Type: Conference Paper

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