Ohmic contacts to 3C-SiC for Schottky diode gas sensors

Solid-State Electronics

Volumn 47, Issue 11, 2003, Pages 2035-2041

  Roy, S ^a   Jacob, C ^a   Basu, S ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY   (India)

Author keywords

3C SiC; Intercontact resistance; Ohmic contacts; SIMS

Indexed keywords

ANNEALING; METALLIZING; OXIDATION; SCHOTTKY BARRIER DIODES; SECONDARY ION MASS SPECTROMETRY; SILICON CARBIDE;

INTERCONTACT RESISTANCE;

CHEMICAL SENSORS;

EID: 0043231398     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0038-1101(03)00235-1     Document Type: Article

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