Micro-structuring of photo resists by UV laser radiation

ICALEO 2002 - 21st International Congress on Applications of Laser and Electro-Optics, Congress Proceedings

Volumn , Issue , 2002, Pages

  Ostendorf, Andreas ^a   Körber, Klaus ^a   Meyer, Frank ^a  

^a LASER ZENTRUM HANNOVER E V   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EXCIMER LASERS; LASER ABLATION; LASER RADIATION; MACHINING; MANUFACTURE; PHOTOLITHOGRAPHY; PRINTED CIRCUIT BOARDS; ULTRAVIOLET LASERS;

EFFICIENT MACHINING; LASER DIRECT WRITING; MACHINING PROCESS; MICRO STRUCTURING; PHOTOLITHOGRAPHIC PROCESS; PHOTOSENSITIVE RESINS; PROCESS CHARACTERISTICS; UV LASER RADIATION;

SILICON WAFERS;

EID: 85085773169     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.2351/1.5066218     Document Type: Conference Paper

References (10)

1. Ehrfeld, W. Handbuch Mikrotechnik. 2002, Hanser, München, ISBN 3-446-21506-9, pp. 187 - 198.
2. Ostendorf, A., Körber, K., Temme, T., Bann, B. and P. Apte. High Speed Micro-Machining with Scanner Deflected UV Laser Radiation. In: ICALEO2000, 2-50ct. 2000, Dearborn, MI, USA, pp A49-A58.
3. Tönshoff, H.K., von Alvensleben, F. and C. Kulik. Advanced 3D-CAD-Interface for Micro Machining with Excimer Lasers. In: SPIE - Design, Test and Microfabrication of MEMS and MOEMS. 3680 (1999) 2, pp. 340 - 348.
4. Tönshoff, H.K., von Alvensleben, F., Rinke, M., Körber, K. and C. Kulik. Machining Concepts for Three-Dimensional Micro-Structuring with Pulsed UV-Lasers. In: MicroEngineering 99 - Proceedings, Congress for Microsystems and Precision Engineering, 29. Sept. - 1. Oct. 1999, Stuttgart, Germany, pp. 176-182.
5. von Alvensleben, F., Körber, K. and C. Kulik. Intelligent 3-D Micro-Structuring with Imaging UV-Laser Systems. In: Conf. on Lasers and Electro-Optics/Europe (CLEO/Europe) 2000, 10.-15. Sept. 2000, ISBN 0-7803-6319-1, p. 162, Nice Acropolis, Nice, France.
6. Dyer, P.E. and R.Y. Farley. Periodic surface structures in the excimer laser ablative etching of polymers. In: Applied Physics Letter. 57(1990)8, pp. 765-767.
7. Srinivasan, R. and W.J. Leigh. Ablative Photodecomposition: Action of Far-Ultraviolet (193 nm) Laser Radiation on Poly(ethylene terephtalate) Films. In: Journal of American Chemical Society, 1982, pp. 6784-6785.
8. Srinivasan, R. and B. Braren. Ablative Photodecomposition of Polymers by UV laser Radiation. In: Lasers in Polymer science and technology: Applications. CRC press, 1990, pp.133 - 178.
9. Tönshoff, H.K., Graumann, C., Rinke, P., Lonergan, P. and J. Wais. Improved Surface Quality of Rotation Symmetric Structures by Excimer Laser Micromachining. In: Laser Materials Processing, ICALEO1997. 83 (1997) 1, pp. 114 - 121.
10. Ghantasala, M.K., Hayes, J.P., Harvey E.C. and D.K. Sood. Patterning, electroplating and removal of SU-8 moulds by excimer laser micromachining. J Micromech Microeng, 11 (2001), pp. 133-139