Intelligent 3-D micro-structuring with UV-laser systems

Conference on Lasers and Electro-Optics Europe - Technical Digest

Volumn , Issue , 2000, Pages 162-

  von Alvensleben, F ^a   Koerber, K ^a   Kulik, C ^a  

^a LASER ZENTRUM HANNOVER E V   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED DESIGN; COMPUTER AIDED MANUFACTURING; COMPUTER CONTROL SYSTEMS; COMPUTER SIMULATION; LASER ABLATION; MICROMACHINING; MICROOPTICS; MICROSTRUCTURE; NUMERICAL CONTROL SYSTEMS; PULSED LASER APPLICATIONS;

MICRO-EMBOSSING; ULTRAVIOLET LASER SYSTEMS;

EXCIMER LASERS;

EID: 0033712969     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)