Improved surface quality of rotation symmetric structures by excimer laser micromachining

Laser Institute of America, Proceedings

Volumn 83, Issue Pt 1, 1997, Pages

  Toenshoff, H K ^a   Graumann, C ^a   Rinke, M ^a   Lonergan, P ^a   Wais, J ^a  

^a LASER ZENTRUM HANNOVER E V   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; EXCIMER LASERS; GLASS; MASKS; MICROMACHINING; POLYMERS; SURFACE PROPERTIES;

LASER MICROMACHINING;

LASER APPLICATIONS;

EID: 0031388146     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)