Advanced 3D-CAD-interface for micro machining with excimer lasers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3680, Issue I, 1999, Pages 340-348

  Tonshoff, H K ^a   von Alvensleben, F ^a   Kulik, C ^a  

^a LASER ZENTRUM HANNOVER E V   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED DESIGN; COMPUTER AIDED MANUFACTURING; COMPUTER SOFTWARE; EXCIMER LASERS; GLASS; INTERFACES (COMPUTER); LASER ABLATION; LASER APPLICATIONS; LASER BEAMS; MATHEMATICAL MODELS; MICROMACHINING; OPTOELECTRONIC DEVICES;

MICROOPTOELECTROMECHANICAL SYSTEMS (MOEMS);

MICROELECTROMECHANICAL DEVICES;

EID: 0032663805     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (6)