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Volumn , Issue , 2007, Pages 143-167

Physical and chemical vapor deposition processes

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EID: 85056074445     PISSN: None     EISSN: None     Source Type: Book    
DOI: None     Document Type: Chapter
Times cited : (3)

References (26)
  • 1
    • 0029322091 scopus 로고
    • In-situ optical diagnosis during pulsed-laser deposition of high-Tc superconductor thin-films
    • Li, Q. et al., In-situ optical diagnosis during pulsed-laser deposition of high-Tc superconductor thin-films, IEEE Trans. Appl. Superconduct. 5,1513-1516,1995.
    • (1995) IEEE Trans. Appl. Superconduct , vol.5 , pp. 1513-1516
    • Li, Q.1
  • 2
    • 0027905392 scopus 로고
    • Pulsed-laser deposition — a versatile technique only for high-temperature superconductor thin-film deposition
    • Habermeier, H. U., Pulsed-laser deposition — a versatile technique only for high-temperature superconductor thin-film deposition, Appl. Surface Sci. 69, 204-211, 1993.
    • (1993) Appl. Surface Sci , vol.69 , pp. 204-211
    • Habermeier, H.U.1
  • 3
    • 0026836099 scopus 로고
    • Y-Ba-Cu-O high-temperature superconductor thin-film preparation by pulsed-laser deposition — recent developments
    • Habermeier, H. U., Y-Ba-Cu-O high-temperature superconductor thin-film preparation by pulsed-laser deposition — recent developments, Mater. Sci. Eng. B-Solid State Mater. Adv. Technol. 13,1-7,1992.
    • (1992) Mater. Sci. Eng. B-Solid State Mater. Adv. Technol , vol.13 , pp. 1-7
    • Habermeier, H.U.1
  • 4
    • 0026219694 scopus 로고
    • Y-Ba-Cu-O high-temperature superconductor thin-film preparation by pulsed laser deposition and Rf-sputtering — a comparative-study
    • Habermeier, H. U. et al., Y-Ba-Cu-O high-temperature superconductor thin-film preparation by pulsed laser deposition and Rf-sputtering — a comparative-study, Phys. C, 180, 17-25, 1991.
    • (1991) Phys. C , vol.180 , pp. 17-25
    • Habermeier, H.U.1
  • 5
    • 0035500579 scopus 로고    scopus 로고
    • Diamond-like-carbon films produced by magnetically guided pulsed laser deposition
    • Minami, H. et al., Diamond-like-carbon films produced by magnetically guided pulsed laser deposition, Appl. Phys. a-Mater. Sci. Proc. 73, 531-534, 2001.
    • (2001) Appl. Phys. A-Mater. Sci. Proc , vol.73 , pp. 531-534
    • Minami, H.1
  • 6
    • 0031171986 scopus 로고    scopus 로고
    • Pulsed laser deposition of diamond-like carbon wear protective coatings: A review
    • Voevodin, A. A., Donley, M. S., and Zabinski, J. S., Pulsed laser deposition of diamond-like carbon wear protective coatings: A review, Surf. Coat. Technol. 92, 42-49, 1997.
    • (1997) Surf. Coat. Technol , vol.92 , pp. 42-49
    • Voevodin, A.A.1    Donley, M.S.2    Zabinski, J.S.3
  • 7
    • 0031272878 scopus 로고    scopus 로고
    • Pulsed laser deposition of diamond-like carbon films under a magnetic field
    • Hou, Q. R. and Gao, J., Pulsed laser deposition of diamond-like carbon films under a magnetic field, J. Phys. Cond. Matter9,10333-10337, 1997.
    • (1997) J. Phys. Cond. Matter , vol.9 , pp. 10333-10337
    • Hou, Q.R.1    Gao, J.2
  • 8
    • 0030562277 scopus 로고    scopus 로고
    • Pulsed-laser deposition of “diamond-like” carbon coating on YBa2Cu3O7 high-Tc superconductor films
    • Karuzskii, A. L. et al., Pulsed-laser deposition of “diamond-like” carbon coating on YBa2Cu3O7 high-Tc superconductor films, Appl. Surface Sci. 92, 457-460,1996.
    • (1996) Appl. Surface Sci , vol.92 , pp. 457-460
    • Karuzskii, A.L.1
  • 9
    • 0030212370 scopus 로고    scopus 로고
    • Preparation of amorphous diamond-like carbon by pulsed laser deposition: A critical review
    • Voevodin, A. A. and Donley, M. S., Preparation of amorphous diamond-like carbon by pulsed laser deposition: A critical review, Surf. Coat. Technol. 82,199-213,1996.
    • (1996) Surf. Coat. Technol , vol.82 , pp. 199-213
    • Voevodin, A.A.1    Donley, M.S.2
  • 10
    • 0029541005 scopus 로고
    • Situ plasma monitoring of pulsed laser deposition of diamond-like carbon films
    • Voevodin, A. A. and Laube, S. J. P., In situ plasma monitoring of pulsed laser deposition of diamond-like carbon films, Surf. Coat. Technol. 77, 670-674,1995.
    • (1995) Surf. Coat. Technol , vol.77 , pp. 670-674
    • Voevodin, A.A.1    Laube, S.J.P.2
  • 11
    • 0004412668 scopus 로고
    • Mechanical and tribological properties of diamond-like carbon coatings prepared by pulsed laser deposition
    • Voevodin, A. A. et al., Mechanical and tribological properties of diamond-like carbon coatings prepared by pulsed laser deposition, Surf. Coat. Technol. 77, 534-539,1995.
    • (1995) Surf. Coat. Technol , vol.77 , pp. 534-539
    • Voevodin, A.A.1
  • 12
    • 21544452592 scopus 로고
    • Pulsed laser deposition of diamond-like carbon-films
    • Pappas, D. L. et al., Pulsed laser deposition of diamond-like carbon-films, J. Appl. Phys. 71, 5675-5684, 1992.
    • (1992) J. Appl. Phys , vol.71 , pp. 5675-5684
    • Pappas, D.L.1
  • 13
    • 0033685950 scopus 로고    scopus 로고
    • Application of RF discharges to sputtering (Reprinted from IBM Journal of Research and Development, vol 14,1970)
    • Koenig, H. R. and Maissel, L. I., Application of RF discharges to sputtering (Reprinted from IBM Journal of Research and Development, vol 14,1970), Ibm J. Res. Develop. 44, 106-110, 2000.
    • (2000) Ibm J. Res. Develop , vol.44 , pp. 106-110
    • Koenig, H.R.1    Maissel, L.I.2
  • 15
    • 0348137163 scopus 로고    scopus 로고
    • Plasma enhanced chemical vapor deposition of amorphous, polymorphous and microcrystalline silicon films
    • Cabarrocas, P. R. I., Plasma enhanced chemical vapor deposition of amorphous, polymorphous and microcrystalline silicon films, J. Non-Cryst. Solids266, 31-37, 2000.
    • (2000) J. Non-Cryst. Solids , vol.266 , pp. 31-37
    • Cabarrocas, P.R.I.1
  • 16
    • 0002572435 scopus 로고
    • Atomic Layer Epitaxy
    • Suntola, T., Atomic Layer Epitaxy, Thin Solid Films216, 84-89, 1992.
    • (1992) Thin Solid Films , vol.216 , pp. 84-89
    • Suntola, T.1
  • 17
    • 0030218562 scopus 로고    scopus 로고
    • Surface chemistry for atomic layer growth
    • George, S. M., Ott, A. W., and Klaus, J. W., Surface chemistry for atomic layer growth, J. Phys. Chem. 100, 13121-13131, 1996.
    • (1996) J. Phys. Chem , vol.100 , pp. 13121-13131
    • George, S.M.1    Ott, A.W.2    Klaus, J.W.3
  • 18
    • 0037912948 scopus 로고    scopus 로고
    • Growth of silicon nanowires via gold/silane vapor-liquid-solid reaction
    • Westwater, J. et al., Growth of silicon nanowires via gold/silane vapor-liquid-solid reaction, J. Vacuum Sci. Technol. B15, 554-557,1997.
    • (1997) J. Vacuum Sci. Technol. B , vol.15 , pp. 554-557
    • Westwater, J.1
  • 19
    • 33751122778 scopus 로고
    • Vapor-liquid-solid mechanism of single crystal growth
    • Wagner, R. S. and Ellis, W. C., Vapor-liquid-solid mechanism of single crystal growth, Appl. Phys. Lett. 4, 89-90, 1964.
    • (1964) Appl. Phys. Lett , vol.4 , pp. 89-90
    • Wagner, R.S.1    Ellis, W.C.2
  • 20
    • 79955991177 scopus 로고    scopus 로고
    • One-dimensional heterostructures in semiconductor nanowhiskers
    • Bjork, M. T. et al., One-dimensional heterostructures in semiconductor nanowhiskers, Appl. Phys. Lett. 80, 1058-1060, 2002.
    • (2002) Appl. Phys. Lett , vol.80 , pp. 1058-1060
    • Bjork, M.T.1
  • 22
    • 0000671585 scopus 로고
    • Nucleus formation in supersaturated systems
    • Weber, M. V. A. A., Nucleus formation in supersaturated systems, Z. Phys. Chem. 119, 227, 1926.
    • (1926) Z. Phys. Chem , vol.119 , pp. 227
    • Weber, M.V.A.A.1
  • 25
    • 0014612979 scopus 로고
    • Investigation of the structure and properties of thick vacuum condensates of nickel, titanium, tungsten, aluminium oxide and zirconium dioxide
    • Demchishin, A. V. and Movchan, B. A., Investigation of the structure and properties of thick vacuum condensates of nickel, titanium, tungsten, aluminium oxide and zirconium dioxide, Fiz. Met. Metalloved. 28, 653, 1969.
    • (1969) Fiz. Met. Metalloved , vol.28 , pp. 653
    • Demchishin, A.V.1    Movchan, B.A.2
  • 26
    • 0016527063 scopus 로고
    • Influence of substrate temperature and deposition rate on structure of thick sputtered Cu coatings
    • Thornton, J. A., Influence of substrate temperature and deposition rate on structure of thick sputtered Cu coatings, J. Vacuum Sci. Technol. 12, 830-835, 1975.
    • (1975) J. Vacuum Sci. Technol , vol.12 , pp. 830-835
    • Thornton, J.A.1


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