Ab initio study of the initial growth mechanism of silicon nitride on (formula presented) using (formula presented)

Physical Review B - Condensed Matter and Materials Physics

Volumn 64, Issue 20, 2001, Pages

  Widjaja, Yuniarto ^a   Musgrave, Charles B ^b  

^a Stanford University   (United States)

^b STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 85038284111     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.64.205303     Document Type: Article

References (59)

1. E. Kooi, J G. Vanlierop, and J A. Appels, J. Electrochem. Soc.123, 1117 (1976).
2. A. Hashimoto, M. Kobayashi, T. Kamijoh, H. Takano, and M. Sakuta, J. Electrochem. Soc.133, 1464 (1986).
3. Silicon Nitride in Electronics, Vol. 34 of Materials Science Monographs, edited by V. I. Belyi (Elsevier, New York, 1988).
4. J W. Osenbach, J. Appl. Phys.63, 4494 (1988).
5. Y. Ma, T. Yasuda, and G. Lucovsky, J. Vac. Sci. Technol. B11, 1533 (1993).
6. T. Ito, T. Nakamura, and H. Ishikawa, IEEE Trans. Electron Devices29, 498 (1982).
7. G W. Yoon, A B. Joshi, J. Kim, G Q. Lo, and D L. Kwong, IEEE Electron Device Lett.13, 606 (1992).
8. P. Avouris, F. Bozso, and R J. Hamers, J. Vac. Sci. Technol. B5, 1387 (1987).
9. P A. Taylor, R M. Wallace, W J. Choyke, M J. Dresser, and J T. Yates, Surf. Sci.215, L286 (1989).
10. J L. Bischoff, F. Lutz, D. Bolmont, and L. Kubler, Surf. Sci.248, L240 (1991).
11. G. Dufour, F. Rochet, H. Roult, and F. Sirotti, Surf. Sci.304, 33 (1994).
12. M M. Moslehi and K C. Saraswat, IEEE Trans. Electron Devices32, 106 (1985).
13. J A. Nemetz and R E. Tressler, Solid State Technol.26, 79 (1983).
14. J A. Nemetz and R E. Tressler, Solid State Technol.26, 209 (1983).
15. S P. Murarka, C C. Chang, and A C. Adams, J. Electrochem. Soc.126, 996 (1979).
16. Y. Hayafuji and K. Kajiwara, J. Electrochem. Soc.129, 2102 (1982).
17. C. Maillot, H. Roulet, and G. Dufour, J. Vac. Sci. Technol. B2, 316 (1984).
18. C H F. Peden, J W. Rogers, N D. Shinn, K B. Kidd, and K L. Tsang, Phys. Rev. B47, 15 622 (1993).
19. J. Stober, B. Eisenhut, G. Rangelov, and T. Fauster, Surf. Sci.321, 111 (1994).
20. M J. Dresser, P A. Taylor, R M. Wallace, W J. Choyke, and J T. Yates, Surf. Sci.218, 75 (1989).
21. M. Fujisawa, Y. Taguchi, Y. Kuwahara, M. Onchi, and M. Nishijima, Phys. Rev. B39, 12 918 (1989).
22. N. Franco, J. Avila, M E. Davila, M C. Asensio, and D P. Woodruff, J. Phys.: Condens. Matter9, 8419 (1997).
23. R H. Zhou, P L. Cao, and S B. Fu, Surf. Sci.249, 129 (1991).
24. X L. Zhou, C R. Flores, and J M. White, Surf. Sci.268, L267 (1992).
25. N W. Moriarty and P V. Smith, Surf. Sci.265, 168 (1992).
26. E. Fattal, M R. Radeke, G. Reynolds, and E A. Carter, J. Phys. Chem. B101, 8658 (1997).
27. R. Miotto, G P. Srivastava, and A C. Ferraz, Phys. Rev. B58, 7944 (1998).
28. S H. Lee and M H. Kang, Phys. Rev. B58, 4903 (1998).
29. J H. Cho and K S. Kim, Phys. Rev. B62, 1607 (2000).
30. Z H. Loh and H C. Kang, J. Chem. Phys.112, 2444 (2000).
31. T. Takaoka and I. Kusunoki, Surf. Sci.413, 30 (1998).
32. Y. Widjaja, M M. Mysinger, and C B. Musgrave, J. Phys. Chem. B104, 2527 (2000).
33. Y. Widjaja and C B. Musgrave, Surf. Sci.469, 9 (2000).
34. C H F. Peden, J W. Rogers, and N D. Shinn, Surf. Sci.320, 369 (1994).
35. C U S. Larsson and A S. Flodstrom, Surf. Sci.241, 3653 (1991).
36. C U S. Larsson, C B M. Andersson, N P. Prince, and A S. Flodstrom, Surf. Sci.271, 349 (1992).
37. F. Bozso and P. Avouris, Phys. Rev. B38, 3937 (1988).
38. S M. Cherif, J P. Lacharme, and C A. Sebenne, Appl. Surf. Sci.56-8, 777 (1992).
39. C. Bater, M. Sanders, and J H. Craig, Surf. Interface Anal.29, 208 (2000).
40. P J. Chen, M L. Colaianni, and J T. Yates, Surf. Sci.274, L605 (1992).
41. P. Hohenberg and W. Kohn, Phys. Rev.136, B864 (1964).
42. A D. Becke, J. Chem. Phys.98, 1372 (1993).
43. C T. Lee, W T. Yang, and R G. Parr, Phys. Rev. B37, 785 (1988).
44. J A. Pople, M. Head-Gordon, and K. Raghavachari, J. Chem. Phys.87, 5968 (1987).
45. M. J. Frisch, G. W. Trucks, B. H. Schlegel, P. M. W. Gill, B. G. Johnson, M. A. Robb, J. R. Cheeseman, T. Keith, G. A. Petersson, J. A. Montgomery, K. Raghavachari, M. A. Al-Laham, V. G. Zakrzewski, J. V. Ortiz, J. B. Foresman, J. Cioslowski, B. B. Stefanov, A. Nanayakkara, M. Challacombe, C. Y. Peng, P. Y. Ayala, W. Chen, M. W. Wong, J. L. Andres, E. S. Replogle, R. Gomperts, R. L. Martin, D. J. Fox, J. S. Binkley, D. J. Defrees, J. Baker, J. P. Stewart, M. Head-Gordon, C. Gonzales, and J. A. Pople, GAUSSIAN 94, Revision E.2, 1995.
46. M. J. Frisch, G. W. Trucks, B. H. Schlegel, P. M. W. Gill, B. G. Johnson, M. A. Robb, J. R. Cheeseman, T. Keith, G. A. Petersson, J. A. Montgomery, K. Raghavachari, M. A. Al-Laham, V. G. Zakrzewski, J. V. Ortiz, J. B. Foresman, J. Cioslowski, B. B. Stefanov, A. Nanayakkara, M. Challacombe, C. Y. Peng, P. Y. Ayala, W. Chen, M. W. Wong, J. L. Andres, E. S. Replogle, R. Gomperts, R. L. Martin, D. J. Fox, J. S. Binkley, D. J. Defrees, J. Baker, J. P. Stewart, M. Head-Gordon, C. Gonzales, and J. A. Pople, GAUSSIAN 98, Revision A.5, 1998.
47. K T. Queeney, Y J. Chabal, and K. Raghavachari, Phys. Rev. Lett.86, 1046 (2001).
48. P. Nachtigall and K D. Jordan, J. Chem. Phys.101, 2648 (1994).
49. C J. Wu and E A. Carter, Phys. Rev. B46, 4651 (1992).
50. C J. Wu, I V. Ionova, and E A. Carter, Phys. Rev. B49, 13 488 (1994).
51. C J. Wu, I V. Ionova, and E A. Carter, Surf. Sci.295, 64 (1993).
52. M R. Radeke and E A. Carter, Phys. Rev. B54, 11 803 (1996).
53. Z. Jing, G. Lucovsky, and J L. Whitten, Surf. Sci.296, L33 (1993).
54. Z. Jing and J L. Whitten, J. Chem. Phys.98, 7466 (1993).
55. D J. Doren, Adv. Chem. Phys.95, 1 (1996).
56. K. Sinniah, M G. Sherman, L B. Lewis, W H. Weinberg, J T. Yates, and K C. Janda, J. Chem. Phys.92, 5700 (1990).
57. M L. Wise, B G. Koehler, P. Gupta, P A. Coon, and S M. George, Surf. Sci.258, 166 (1991).
58. U. Hofer, L P. Li, and T F. Heinz, Phys. Rev. B45, 9485 (1992).
59. M C. Flowers, N B H. Jonathan, Y. Liu, and A. Morris, J. Chem. Phys.99, 7038 (1993).