Ammonia as a precursor in electron-enhanced nitridation of Si(100)

Surface and Interface Analysis

Volumn 29, Issue 3, 2000, Pages 208-214

  Bater, C ^a   Sanders, M ^a   Craig, J H ^a  

^a UNIVERSITY OF TEXAS AT EL PASO   (United States)

Author keywords

Ammonia; ESD; HREELS; Nitridation; Si(100); XPS

Indexed keywords

EID: 0002875625     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1096-9918(200003)29:3<208::AID-SIA688>3.0.CO;2-5     Document Type: Article

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