Piezoelectric T-beam microactuators

2008 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2008

Volumn 4, Issue , 2009, Pages 909-914

  Kommepalli, Hareesh K R ^a   Rahn, Christopher D ^a   Hirsh, Andrew D ^a   Tadigadapa, Srinivas A ^a  

^a The Pennsylvania State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIMORPH ACTUATION; BLOCKING FORCES; CROSS-SECTION GEOMETRY; ICP-RIE; IN-PLANE; OUT-OF-PLANE; PIEZOELECTRIC MEMS; PZT;

FABRICATION; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC MATERIALS; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; SEMICONDUCTING LEAD COMPOUNDS;

STRUCTURAL DESIGN;

EID: 69949133354     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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