SiOx nanowires grown via the active oxidation of silicon

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 17, Issue 4, 2011, Pages 785-793

  Shalav, Avi ^a   Kim, Taehyun ^a   Elliman, Robert G ^a  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

Active oxidation; coatings; nanowires (NWs); secondary growth; silica; silicon

Indexed keywords

AMORPHOUS SILICON; COATINGS; GOLD COATINGS; NANOWIRES; OXIDATION; SILICA; SILICON; SILICON WAFERS; SUBSTRATES;

ACTIVE OXIDATIONS; GOLD-COATED SILICON WAFERS; HIGH-TEMPERATURE ANNEALING; NANOWIRES (NWS); SECONDARY GROWTH; SI SUBSTRATES; SILICA NANO WIRES;

SILICON OXIDES;

EID: 85027942156     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSTQE.2010.2064288     Document Type: Review

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