A tip-tilt-piston micromirror with an elastomeric universal joint fabricated via micromasonry

Journal of Microelectromechanical Systems

Volumn 24, Issue 2, 2015, Pages 262-264

  Yang, Zining ^a   Jeong, Bongwon ^a   Vakakis, Alexander ^a   Kim, Seok ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

micro masonry; microassembly; Micromirror; microscanner; transfer printing.

Indexed keywords

ELASTOMERS; ELECTROSTATIC ACTUATORS; HYBRID SYSTEMS; PISTONS; SILICON; SINGLE CRYSTALS; UNIVERSAL JOINTS;

MICRO ASSEMBLY; MICRO MIRROR; MICRO-MASONRY; MICROSCANNER; TRANSFER PRINTING;

SILICON WAFERS;

EID: 85027924943     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2015.2405032     Document Type: Article

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