Silicon micro-masonry using elastomeric stamps for three-dimensional microfabrication

Journal of Micromechanics and Microengineering

Volumn 22, Issue 5, 2012, Pages

  Keum, Hohyun ^a   Carlson, Andrew ^b   Ning, Hailong ^b   Mihi, Agustin ^b   Eisenhaure, Jeffrey D ^a   Braun, Paul V ^b   Rogers, John A ^b   Kim, Seok ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONSTRUCTION SITES; ELASTOMERIC STAMPS; MICRO-COMPONENTS; MICRO-MANUFACTURING; MICRO-SCALES; SILICON MICROSTRUCTURES; TARGET LOCATION; THREE-DIMENSIONAL MICRO-FABRICATION; TRANSFER PRINTING;

MICROSYSTEMS; THREE DIMENSIONAL;

MASONRY MATERIALS;

EID: 84860469471     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/22/5/055018     Document Type: Article

References (20)

1. Madou M J 2002 Fundamentals of Microfabrication : The Science of Miniaturization (Boca Raton, FL: CRC Press)
2. Hyman D et al 1999 GaAs-compatible surface-micromachined RF MEMS switches Electron. Lett. 35 2246
3. Goldsmith C L, Zhimin Y, Eshelman S and Denniston D 1998 Performance of low-loss RF MEMS capacitive switches IEEE Microw. Guided. Wave Lett 8 26971 (Pubitemid 128446303)
4. Stievater T H, Rabinovich W S, Ferraro M S, Papanicolaou N A, Bass R, Boos J B, Stepnowski J L and McGill R A 2008 Photonic microharp chemical sensors Opt. Express 16 242330 (Pubitemid 351293462)
5. Chae J, Kulah H and Najafi K 2005 A monolithic three-axis micro-g micromachined silicon capacitive accelerometer J. Microelectromech. S. 14 23542 (Pubitemid 40679614)
6. van Kessel P, Hornbeck L, Meier R and Douglass M 1998 A MEMS-based projection display P Proc. IEEE. 86 1687704
7. Mitcheson P D, Green T C, Yeatman E M and Holmes A S 2004 Architectures for vibration-driven micropower generators J. Microelectromech. S. 13 42940
8. Judy J W 2001 Microelectromechanical systems (MEMS): fabrication, design and applications Smart Mater. Struct. 10 111534 (Pubitemid 34050629)
9. Clark T D, Tien J, Duffy D C, Paul K and Whitesides G M 2001 Self-assembly of 10-m-sized objects into ordered three-dimensional arrays J. Am. Chem. Soc. 123 767782 (Pubitemid 32899403)
10. Bassik N, Stern G M and Gracias D H 2009 Microassembly based on hands free origami with bidirectional curvature Appl. Phys. Lett. 95 091901
11. Ehrfeld W and Schmidt A 1998 Recent developments in deep x-ray lithography J. Vac. Sci. Technol. B 16 352634 (Pubitemid 128600968)
12. Xia C G and Fang N X 2009 Fully three-dimensional micro fabrication with grayscale polymeric self-sacrificial structure J. Micromech. Microeng. 19 115029
13. http://en.wikipedia.org/wiki/Masonry Dec 2011
14. Fernandez J G and Khademhosseini A 2010 Micro-masonry: construction of 3d structures by microscale self-assembly Adv. Mater. 22 253841
15. Kim S et al 2010 Microstructured elastomeric surfaces with reversible adhesion and examples of their use in deterministic assembly by transfer printing Proc. Natl Acad. Sci. USA 107 17095100
16. Meitl M A, Zhu Z-T, Kumar V, Lee K J, Feng X, Huang Y Y, Adesida I, Nuzzo R G and Rogers J A 2006 Transfer printing by kinetic control of adhesion to an alastomeric stamp Nat. Mater. 5 338 (Pubitemid 43049385)
17. Kim D-H, Liu Z., Kim Y-S, Wu J, Song J, Kim H-S, Huang Y, Hwang K-C, Zhang Y and Rogers J A 2009 Optimized structural designs for stretchable silicon integrated circuits Small 5 28417
18. Chaudhury M K and Whitesides G M 1990 Direct measurement of interfacial interactions between semispherical lenses and flat sheets of poly(dimethylsiloxane) and their chemical derivatives Langmuir 7 101325
19. Wurtz G A, Pollard R and Zayats A V 2006 Optical bistability in nonlinear surface-plasmon polaritonic crystals Phys. Rev. Lett. 97 057402 (Pubitemid 44188123)
20. Hecht E 2001 Optics (San Francisco, CA: Addison Wesley)