A novel means of fabricating microporous structures for the dielectric layers of capacitive pressure sensor

Microelectronic Engineering

Volumn 179, Issue , 2017, Pages 60-66

  Yoon, Joon Il ^a   Choi, Kyo Sang ^a   Chang, Sung Pil ^a  

^a Inha University   (South Korea)

Author keywords

3D printer; Capacitive pressure sensor; Dielectric layer; Flexible; Micro pores; PDMS

Indexed keywords

3D PRINTERS; MICROCHANNELS; MICROPOROSITY; PARTIAL PRESSURE SENSORS; PRESSURE SENSORS; PULSE WIDTH MODULATION;

CAPACITIVE PRESSURE SENSORS; CONTROL MORPHOLOGY; DIELECTRIC LAYER; DIFFERENT LAYERS; FLEXIBLE; HIGH SENSITIVITY; MICRO-POROUS STRUCTURE; MICROPORES;

CAPACITIVE SENSORS;

EID: 85018378563     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2017.04.028     Document Type: Article

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