Mechanical properties of TiN Thin films investigated using biaxial tensile testing

Surface Engineering

Volumn 14, Issue 3, 1998, Pages 240-245

  Shojaei, O R ^a   Kruml, T ^a   Karimi, A ^a   Martin, J L ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

DENSITY (SPECIFIC GRAVITY); ELASTIC MODULI; FILM GROWTH; MICROSTRUCTURE; NANOSTRUCTURED MATERIALS; RESIDUAL STRESSES; SILICON NITRIDE; SILICON WAFERS; TENSILE TESTING; THERMAL EFFECTS; THIN FILMS; TITANIUM NITRIDE;

BULGE TESTING; ELECTRON PROBE MICROSCOPY;

PROTECTIVE COATINGS;

EID: 0031631011     PISSN: 02670844     EISSN: None     Source Type: Journal    
DOI: 10.1179/sur.1998.14.3.240     Document Type: Article

References (20)

1. F. ELSTNER, A. EHRLICH, H. GIEGENGACK, H. KUPFER, and F. RICHTER: J. Van. Sci. Technol., 1994, A12, 476-483.
2. W. J. MENG and G. L. EESLEY: Thin Solid Films, 1995, 271, 108-116.
3. F. R. BROTZEN: Int. Mater. Rev., 1994, 39, 24-45.
4. J. A. SCHWEITZ: MRS Bull., 1992, 17, 34-45.
5. E. I. BROMLEY, J. N. RANDALL, D. C. FLANDERS, and R. W. MOUNTAIN: J. Vac. Sci. Technol., 1983, B1, 1364-1366.
6. M. OHRING: in The materials science of thin films', 410; 1992, London, Academic Press.
7. J. W. BEAMS: in 'The structure and properties of thin films', (ed. C. A. Neugebauer et al.), 183; 1960, New York, NY, Wiley.
8. A. CATLIN and W. P. WALKER: J. Appl. Phys., 1960, 31, 2135-2139.
9. R. J. JACCODINE and W. A. SCHLEGEL: J. Appl. Phys., 1966, 37, 2429-2434.
10. J. J. VLASSAK: 'New experimental techniques and analysis methods for the study of the mechanical properties of materials in small volumes', PhD thesis. Stanford University. CA, USA, 1994.
11. J. J. VLASSAK and W. D. NIX: J. Mater. Res., 1992, 7, 3242-3249.
12. V. M. PAVIOT. J. J. VLASSAK, and W. D. NIX: in Thin films: stresses and mechanical properties V', 579-584; 1995, Pittsburgh, PA, MRS.
13. M. K. SMALL, J. J. VLASSAK, S. F. POWEL, B. J. DANIELS, and W. D. NIX: in 'Thin films: stresses and mechanical properties', 159-164: 1993, Pittsburgh, PA, MRS.
14. E. TÖRÖK, A. J. PERRY, L. CHOLET, and W. D. SPROUL: Thin Solid Films, 1987, 153, 37-43.
15. A. F. JANKOWSKI and T. TSAKALAKOS: Thin Solid Films, 1996, 290/291, 243-247.
16. X. JIANG, M. WANG, K. SCHMIDT, E. DUNLOP, J. HAUPT, and W. GISSLER: J. Appl. Phys., 1991, 69, 3053-3057.
17. K. I. PORTNOI, A. A. MUSKASEEV, V. N. GRIBKOV, and Y. V. LEVINSKI: Sov. Powder Metall. Mat. Ceram., 1968, 65. 406.
18. D. MÜLLER and E. FROMM: Thin Solid Films, 1995, 270, 411-416.
19. A. ROUZAUD, E. BARBIER, J. ERRNOULT, and E. QUESNEL: Thin Solid Films, 1995, 270, 270-274.
20. A, WITTLING, A. BENDAVID, P. J. MARTIN, and M. V. SWAIN: Thin Solid Films, 1995, 270, 283-288.