Servo system design of a high-resolution piezo-driven fine stage for step-and-repeat microlithography systems

IECON Proceedings (Industrial Electronics Conference)

Volumn 1, Issue , 1999, Pages 11-16

  Tsai, Kuen Yu ^a   Yen, Jia Yush ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ALGORITHMS; IDENTIFICATION (CONTROL SYSTEMS); MULTIVARIABLE CONTROL SYSTEMS; PIEZOELECTRIC DEVICES; SERVOMECHANISMS;

MICROLITHOGRAPHY STEPPERS; OPTICAL WAFER STEPPERS;

LITHOGRAPHY;

EID: 0033282440     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (17)