Analytical and experimental study on a piezoelectric linear motor

Smart Materials and Structures

Volumn 7, Issue 3, 1998, Pages 382-388

  Ling, Shih Fu ^a   Du, Hejun ^a   Jiang, Tieying ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; COMPUTER SIMULATION; EQUIPMENT TESTING; LINEAR MOTORS; MATHEMATICAL MODELS;

PIEZOELECTRIC LINEAR MOTORS;

PIEZOELECTRIC DEVICES;

EID: 0032098696     PISSN: 09641726     EISSN: None     Source Type: Journal    
DOI: 10.1088/0964-1726/7/3/012     Document Type: Article

References (6)

1. Higuchi T, Watanabe M and Kudoh K 1988 Precise positioner utilizing rapid deformations of a piezo electric element J. Japan. Soc. Precision Eng. 54
2. Yamagata Y, Higuchi T, Saeki H and Ishimaru H 1990 Ultrahigh vacuum precise positioning device utilizing rapid deformations of piezoelectric elements J. Vac. Sci. Technol. A
3. Asanno M, Matsuoka T, Okamoto H, Mitsuishi S and Matsui T 1995 Study for micro mobile machine with piezoelectric driving force actuator IEEE Int. Conf. on Robotics and Automation pp 2955-60
4. Matsuoka T et al 1994 A prototype model of micro mobile machine with piezoelectric driving force actuator Proc. 5th Int. Symp. On Micro Machine and Human Science Chubu Ind. Adv. Ctr; City Nagoya; Federat, Micromachine Technol.; IEEE, Ind. Electr. Soc.; IEEE, Robot. and Automat. Soc.; Japan. Robot Assoc.; Japan. Soc. Mech. Engineers; Micromachine Ctr; Res. Comm. Micro Machine; Robot. Soc. Japan; Soc. Instrument and Control Engineers pp 47-54
5. Yamagata Y and Higuchi T 1995 A micropositioning device for precision automatic assembly using impact force of piezoelectric elements IEEE Int. Conf. on Robotics and Automation pp 666-71
6. Higuchi T, Yamagata Y, Furutani K and Kudoh K 1990 Precise positioning mechanism utilizing rapid deformations of piezoelectric elements Robots Proc. IEEE Micro Electro Mechani Syst Invest Micro Struct Sens Actuators Mach Rob (Piscataway, NJ: IEEE) pp 222-6