메뉴 건너뛰기




Volumn 9, Issue 4, 2009, Pages 411-418

Infrared Sensing With Self-Supporting YBCO Uncooled IR Microbolometer Array Integrated With On-Chip CCBDI Readout Circuit

Author keywords

Infrared; microbolometer; readout integrated circuit; yttrium barium copper oxide (YBCO)

Indexed keywords


EID: 85008013299     PISSN: 1530437X     EISSN: 15581748     Source Type: Journal    
DOI: 10.1109/JSEN.2009.2014404     Document Type: Article
Times cited : (7)

References (15)
  • 1
  • 2
    • 0031210262 scopus 로고    scopus 로고
    • Focal-plane-arrays and CMOS readout techniques of infrared imaging systems
    • Aug.
    • C.-C. Hsieh, C.-Y. Wu, F.-W. Jih, and T.-P. Sun, “Focal-plane-arrays and CMOS readout techniques of infrared imaging systems,” IEEE Trans. Circuits Syst. Video Technol., vol. 7, pp. 594–605, Aug. 1997.
    • (1997) IEEE Trans. Circuits Syst. Video Technol , vol.7 , pp. 594-605
    • Hsieh, C.-C.1    Wu, C.-Y.2    Jih, F.-W.3    Sun, T.-P.4
  • 3
    • 0032137158 scopus 로고    scopus 로고
    • Monolithic two-dimensional arrays of micromachined microstructures for infrared applications
    • B. E. Cole, R. E. Higashi, and R. A. Wood, “Monolithic two-dimensional arrays of micromachined microstructures for infrared applications,” Proc. IEEE, vol. 86, p. 1679, 1998.
    • (1998) Proc. IEEE , vol.86 , pp. 1679
    • Cole, B.E.1    Higashi, R.E.2    Wood, R.A.3
  • 4
    • 0003606316 scopus 로고    scopus 로고
    • P. W. Kruse and D. D. Skatrud, Eds. San Diego, CA: Academic, Semiconductors and Semimetals
    • R. A. Wood, Uncooled Infrared Imaging Arrays and Systems, P. W. Kruse and D. D. Skatrud, Eds. San Diego, CA: Academic, 1997, vol. 47, Semiconductors and Semimetals.
    • (1997) Uncooled Infrared Imaging Arrays and Systems , vol.47
    • Wood, R.A.1
  • 5
    • 19044391603 scopus 로고    scopus 로고
    • Micromachined bolometer with single-crystal silicon diode as temperature sensor
    • May
    • P. Neuzil, Y. Liu, H.-H. Feng, and W. Zeng, “Micromachined bolometer with single-crystal silicon diode as temperature sensor,” IEEE Electron Device Lett., vol. 26, pp. 320–322, May 2005.
    • (2005) IEEE Electron Device Lett , vol.26 , pp. 320-322
    • Neuzil, P.1    Liu, Y.2    Feng, H.-H.3    Zeng, W.4
  • 6
    • 29244460085 scopus 로고    scopus 로고
    • Temperature sensitivity of SOI-CMOS transistors for use in uncooled thermal sensing
    • Dec.
    • E. Socher, S. M. Beer, and Y. Nemirovsky, “Temperature sensitivity of SOI-CMOS transistors for use in uncooled thermal sensing,” IEEE Trans. Electron Devices, vol. 52, no. 12, pp. 2784–2790, Dec. 2005.
    • (2005) IEEE Trans. Electron Devices , vol.52 , Issue.12 , pp. 2784-2790
    • Socher, E.1    Beer, S.M.2    Nemirovsky, Y.3
  • 7
    • 40449130223 scopus 로고    scopus 로고
    • A low-cost 128 Χ 128 uncooled infrared detector array in CMOS process
    • Feb.
    • S. Eminoglu, M. Y. Tanrikulu, and T. Akin, “A low-cost 128 Χ 128 uncooled infrared detector array in CMOS process,” J. Microelectromech. Syst., vol. 17, pp. 20–30, Feb. 2008.
    • (2008) J. Microelectromech. Syst , vol.17 , pp. 20-30
    • Eminoglu, S.1    Tanrikulu, M.Y.2    Akin, T.3
  • 8
    • 0035441219 scopus 로고    scopus 로고
    • Self-supporting uncooled infraredmicrobolometers with low-thermal mass
    • Sep.
    • M. Almasri, D. P. Butler, and Z. Ηelik-Butler, “Self-supporting uncooled infraredmicrobolometers with low-thermal mass,” IEEE/ASME J. Microelectromech. Syst., vol. 10, pp. 469–476, Sep. 2001.
    • (2001) IEEE/ASME J. Microelectromech. Syst , vol.10 , pp. 469-476
    • Almasri, M.1    Butler, D.P.2    Ηelik-Butler, Z.3
  • 9
    • 0000804858 scopus 로고
    • Semiconducting YBCO thin films for uncooled infrared bolometers
    • P. C. Shan, Z. Ηelik-Butler, D. P. Butler, and A. Jahanzeb, “Semiconducting YBCO thin films for uncooled infrared bolometers,” J. Appl. Phys., vol. 78, no. 12, pp. 7334–7339, 1995.
    • (1995) J. Appl. Phys , vol.78 , Issue.12 , pp. 7334-7339
    • Shan, P.C.1    Ηelik-Butler, Z.2    Butler, D.P.3    Jahanzeb, A.4
  • 11
    • 0032633668 scopus 로고    scopus 로고
    • The design of high-performance 128 Χ 128 CMOS image sensors using new current-readout techniques
    • Albuquerque, NM, Nov.
    • Y. Shih and C. Wu, “The design of high-performance 128 Χ 128 CMOS image sensors using new current-readout techniques,” in Proc. IEEE Int. Symp. Circuits and Systems, Albuquerque, NM, Nov. 1999, pp. 168–171.
    • (1999) Proc. IEEE Int. Symp. Circuits and Systems , pp. 168-171
    • Shih, Y.1    Wu, C.2
  • 13
    • 85008022446 scopus 로고    scopus 로고
    • [Online]. Available
    • [Online]. Available: http://www.mosis.org
  • 14
    • 34547583591 scopus 로고    scopus 로고
    • Fabrication of CMOS compatible semiconducting YBCO uncooled infrared microbolometer arrays
    • Aug.
    • S. Kumar, M. M. Chitteboyina, and D. P. Butler, “Fabrication of CMOS compatible semiconducting YBCO uncooled infrared microbolometer arrays,” J. Vacuum Sci. Technol. B, vol. 25, no. 4, pp. 1315–1320, Aug. 2007.
    • (2007) J. Vacuum Sci. Technol. B , vol.25 , Issue.4 , pp. 1315-1320
    • Kumar, S.1    Chitteboyina, M.M.2    Butler, D.P.3
  • 15
    • 33947323476 scopus 로고    scopus 로고
    • Noise measurements on optical detectors
    • Dec.
    • F. J. Gonzalez, “Noise measurements on optical detectors,” Revista Mexicana De Fisica, vol. 52, no. 6, pp. 550–554, Dec. 2006.
    • (2006) Revista Mexicana De Fisica , vol.52 , Issue.6 , pp. 550-554
    • Gonzalez, F.J.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.