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Volumn 25, Issue 4, 2007, Pages 1315-1320
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Fabrication of complementary metal-oxide-semiconductor compatible semiconducting yttrium barium copper oxide uncooled infrared microbolometer arrays
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Author keywords
[No Author keywords available]
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Indexed keywords
BOLOMETERS;
FABRICATION;
HIGH TEMPERATURE EFFECTS;
INFRARED RADIATION;
YTTRIUM COMPOUNDS;
CAPACITIVE TRANSIMPEDANCE AMPLIFIER;
MICROBOLOMETER ARRAYS;
THERMAL ISOLATION;
MOSFET DEVICES;
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EID: 34547583591
PISSN: 10711023
EISSN: None
Source Type: Journal
DOI: 10.1116/1.2756551 Document Type: Article |
Times cited : (6)
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References (13)
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