메뉴 건너뛰기




Volumn 2016-November, Issue , 2016, Pages 221-224

Evolution of oxide disruptions: The (W)hole story about poly-Si/c-Si passivating contacts

Author keywords

junction formation; passivating contacts; pinholes; polysilicon; silicon; silicon oxide

Indexed keywords

PASSIVATION; POLYCRYSTALLINE MATERIALS; POLYSILICON; SILICON; SILICON OXIDES;

EID: 85003571528     PISSN: 01608371     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/PVSC.2016.7749582     Document Type: Conference Paper
Times cited : (29)

References (24)
  • 2
    • 84899723237 scopus 로고    scopus 로고
    • A simple model describing the symmetric i-v characteristics of p polycrystalline si/n monocrystalline si, and n polycrystalline si/p monocrystalline si junctions
    • R. Peibst, U. Römer, K. R. Hofmann, B. Lim, T. F. Wietler, J. Krügener, N.-P. Harder, and R. Brendel, "A Simple Model Describing the Symmetric I-V Characteristics of p Polycrystalline Si/n Monocrystalline Si, and n Polycrystalline Si/p Monocrystalline Si Junctions, " IEEE Journal of Photovoltaics, vol. 4, pp. 841-850, 2014.
    • (2014) IEEE Journal of Photovoltaics , vol.4 , pp. 841-850
    • Peibst, R.1    Römer, U.2    Hofmann, K.R.3    Lim, B.4    Wietler, T.F.5    Krügener, J.6    Harder, N.-P.7    Brendel, R.8
  • 6
    • 0018545806 scopus 로고
    • The SIS tunnel emitter: A theory for emitters with thin interface layers
    • H. C. de Graaff and J. G. de Groot, "The SIS tunnel emitter: A theory for emitters with thin interface layers, " IEEE Transactions on Electron Devices, vol. 26, pp. 1771-1776, 1979.
    • (1979) IEEE Transactions on Electron Devices , vol.26 , pp. 1771-1776
    • De Graaff, H.C.1    De Groot, J.G.2
  • 7
    • 0019080362 scopus 로고
    • Effect of emitter contact on current gain of silicon bipolar devices
    • T. H. Ning, and R. D. Isaac, "Effect of emitter contact on current gain of silicon bipolar devices", IEEE Transactions on Electron Devices, vol. 27, pp. 2051, 1980.
    • (1980) IEEE Transactions on Electron Devices , vol.27 , pp. 2051
    • Ning, T.H.1    Isaac, R.D.2
  • 8
    • 0020275804 scopus 로고
    • The role of the interfacial layer in polysilicon emitter bipolar transistors
    • A. A. Eltoukhy, and D. J. Roulston, "The role of the interfacial layer in polysilicon emitter bipolar transistors, " IEEE Transactions on Electron Devices, vol. 29, pp. 1862-1869, 1982.
    • (1982) IEEE Transactions on Electron Devices , vol.29 , pp. 1862-1869
    • Eltoukhy, A.A.1    Roulston, D.J.2
  • 9
    • 0022045066 scopus 로고
    • Experimental study of the minority-carrier transport at the polysilicon-monosilicon interface
    • A. Neugroschel, M. Arienzo, Y. Komem, and R. D. Isaac, "Experimental study of the minority-carrier transport at the polysilicon-monosilicon interface, " IEEE Transactions on Electron Devices, vol. 32, pp. 807-816, 1985.
    • (1985) IEEE Transactions on Electron Devices , vol.32 , pp. 807-816
    • Neugroschel, A.1    Arienzo, M.2    Komem, Y.3    Isaac, R.D.4
  • 10
    • 0001527010 scopus 로고
    • An investigation of the thermal stability of the interfacial oxide in polycrystalline silicon emitter bipolar transistors by comparing device results with high-resolution electron microscopy observations
    • G. R. Wolstenholme, N. Jorgensen, P. Ashburn, and G. R. Booker, "An investigation of the thermal stability of the interfacial oxide in polycrystalline silicon emitter bipolar transistors by comparing device results with high-resolution electron microscopy observations, " Journal of Applied Physics, vol. 61, pp. 225-233, 1987.
    • (1987) Journal of Applied Physics , vol.61 , pp. 225-233
    • Wolstenholme, G.R.1    Jorgensen, N.2    Ashburn, P.3    Booker, G.R.4
  • 11
    • 0022813390 scopus 로고
    • N-type SIPOS and poly-silicon emitters
    • Y. H. Kwark, R. M. Swanson, "N-type SIPOS and poly-silicon emitters", Solid-State Electronics, vol. 30, pp. 1121-1125, 1987.
    • (1987) Solid-State Electronics , vol.30 , pp. 1121-1125
    • Kwark, Y.H.1    Swanson, R.M.2
  • 12
    • 0026219240 scopus 로고
    • Demonstration of the importance of the oxide breakup in polysilicon-contacted-emitter modeling
    • J. L. Egley and J. L. Gray, "Demonstration of the importance of the oxide breakup in polysilicon-contacted-emitter modeling, " IEEE Transactions on Electron Devices, vol. 38, pp. 2112-2117, 1991.
    • (1991) IEEE Transactions on Electron Devices , vol.38 , pp. 2112-2117
    • Egley, J.L.1    Gray, J.L.2
  • 13
    • 0019265772 scopus 로고
    • A minority-carrier transport model for polysilicon contacts to silicon bipolar devices, including solar cells
    • J. G. Fossum, and M. A. Shibib, "A minority-carrier transport model for polysilicon contacts to silicon bipolar devices, including solar cells, " in International Electron Devices Meeting, 1980, pp. 280-283.
    • (1980) International Electron Devices Meeting , pp. 280-283
    • Fossum, J.G.1    Shibib, M.A.2
  • 15
    • 0005506619 scopus 로고
    • A 720 mV open circuit voltage SiOx : C-Si: SiOx double heterostructure solar cell
    • E. Yablonovitch, T. Gmitter, R. M. Swanson, Y. H. Kwark, "A 720 mV open circuit voltage SiOx : c-Si: SiOx double heterostructure solar cell, " Applied Physics Letters, vol. 47, pp. 1211-1213, 1985
    • (1985) Applied Physics Letters , vol.47 , pp. 1211-1213
    • Yablonovitch, E.1    Gmitter, T.2    Swanson, R.M.3    Kwark, Y.H.4
  • 16
    • 0022216851 scopus 로고
    • A polysilicon emitter solar cell
    • N. G. Tarr, "A polysilicon emitter solar cell, " IEEE Electron Device Letters, vol. 6, pp. 655-658, 1985.
    • (1985) IEEE Electron Device Letters , vol.6 , pp. 655-658
    • Tarr, N.G.1
  • 17
    • 0026253939 scopus 로고
    • Investigation of boron diffusion in polysilicon and its application to the design of p-n-p polysilicon emitter bipolar transistors with shallow emitter junctions
    • I. R. C. Post, and P. Ashburn, "Investigation of boron diffusion in polysilicon and its application to the design of p-n-p polysilicon emitter bipolar transistors with shallow emitter junctions, " IEEE Transactions on Electron Devices, vol. 38, pp. 2442-2451, 1991.
    • (1991) IEEE Transactions on Electron Devices , vol.38 , pp. 2442-2451
    • Post, I.R.C.1    Ashburn, P.2
  • 19
    • 0026897945 scopus 로고
    • Polysilicon emitters for bipolar transistors: A review and re-evaluation of theory and experiment
    • I. R. C. Post, P. Ashburn, and G. R. Wolstenholme, "Polysilicon emitters for bipolar transistors: A review and re-evaluation of theory and experiment, " IEEE Transactions on Electron Devices, vol. 39, pp. 1717-1731, 1992.
    • (1992) IEEE Transactions on Electron Devices , vol.39 , pp. 1717-1731
    • Post, I.R.C.1    Ashburn, P.2    Wolstenholme, G.R.3
  • 20
    • 0031103923 scopus 로고    scopus 로고
    • On the modeling of polysilicon emitter bipolar transistors
    • N. F. Rinaldi, "On the modeling of polysilicon emitter bipolar transistors, " IEEE Transactions on Electron Devices, vol. 44, pp. 395-403, 1997.
    • (1997) IEEE Transactions on Electron Devices , vol.44 , pp. 395-403
    • Rinaldi, N.F.1
  • 21
    • 84940037921 scopus 로고    scopus 로고
    • Numerical simulation of carrier-selective electron contacts featuring tunnel oxides
    • H. Steinkemper, F. Feldmann, M. Bivour, and M. Hermle "Numerical Simulation of Carrier-Selective Electron Contacts Featuring Tunnel Oxides, " IEEE Journal of Photovoltaics, vol. 5, pp. 1348-1356, 2014.
    • (2014) IEEE Journal of Photovoltaics , vol.5 , pp. 1348-1356
    • Steinkemper, H.1    Feldmann, F.2    Bivour, M.3    Hermle, M.4
  • 22
    • 0022306789 scopus 로고
    • Measurement of the emitter saturation current by a contactless photoconductivity decay method
    • D. E. Kane, and R. M. Swanson, "Measurement of the Emitter Saturation Current by a Contactless Photoconductivity Decay Method, " in 18th IEEE Photovoltaic Specialists Conference, pp. 578-583, 1985.
    • (1985) 18th IEEE Photovoltaic Specialists Conference , pp. 578-583
    • Kane, D.E.1    Swanson, R.M.2
  • 23
    • 0007222962 scopus 로고
    • Early stage evolution kinetics of the polysilicon/single-crystal silicon interfacial oxide upon annealing
    • S. A. Ajuria and R. Reif, "Early stage evolution kinetics of the polysilicon/single-crystal silicon interfacial oxide upon annealing, " Journal of Applied Physics, vol. 69, pp. 662-667, 1991.
    • (1991) Journal of Applied Physics , vol.69 , pp. 662-667
    • Ajuria, S.A.1    Reif, R.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.